MW Cole, PC Joshi, CW Hubbard, MC Wood… - Journal of Applied …, 2000 - cir.nii.ac.jp
抄録< jats: p> Ni/WSi/Ti/Pt Ohmic contacts to n-SiC were investigated as a function of
annealing temperatures up to 1000 C. Annealing at temperatures between 950 and 1000 C …