Process for fabricating a semiconductor device including a nonvolatile memory cell

U Sharma, SW Sun, JR Yeargain - US Patent 6,017,792, 2000 - Google Patents
State of the art nonvolatile memory devices are typically constructed by fabricating a field
effect transistor (FET) in a silicon substrate. The field effect transistor is capable of Storing …

Process for fabricating a semiconductor device including a nonvolatile memory cell

U Sharma, S Sun, JR Yeargain - US Patent 6,017,792, 2000 - freepatentsonline.com
A nonvolatile memory device includes a floating-gate electrode (14) overlying a surface (24)
of a substrate (10). A diffusion barrier layer (34) extends from the substrate surface (24) …