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[HTML][HTML] Impact of VUV photons on SiO2 and organosilicate low-k dielectrics: General behavior, practical applications, and atomic models

MR Baklanov, V Jousseaume, TV Rakhimova… - Applied Physics …, 2019 - pubs.aip.org
This paper presents an in-depth overview of the application and impact of UV/VUV light in
advanced interconnect technology. UV light application in BEOL historically was mainly …
被引用次数：52 相关文章

Impact of VUV photons on SiO2 and organosilicate low-k dielectrics: General behavior, practical applications, and atomic models

MR Baklanov, V Jousseaume, TV Rakhimova… - Applied Physics …, 2019 - pubs.aip.org
This paper presents an in-depth overview of the application and impact of UV/VUV light in
advanced interconnect technology. UV light application in BEOL historically was mainly …

Impact of VUV photons on SiO 2 and organosilicate low-k dielectrics: General behavior, practical applications, and atomic models

MR Baklanov, V Jousseaume, TV Rakhimova… - Applied Physics …, 2019 - elibrary.ru
This paper presents an in-depth overview of the application and impact of UV/VUV light in
advanced interconnect technology. UV light application in BEOL historically was mainly …
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[PDF][PDF] Impact of VUV Photons on SiO2 and Organosilicate Low-k Dielectrics: General Behavior, Practical Applications and Atomic Models.

MR Baklanov, V Jousseaume, T Rakhimova, D Lopaev… - lirias.kuleuven.be
Impact of VUV Photons on SiO2 and Organosilicate Low-k Dielectrics: General Behavior,
Practical Applications and Atomic Models. Page 1 1 Impact of VUV Photons on SiO2 and …

Impact of VUV photons on SiO2 and organosilicate low-k dielectrics: General behavior, practical applications, and atomic models

MR Baklanov, V Jousseaume… - Applied Physics …, 2019 - ui.adsabs.harvard.edu
This paper presents an in-depth overview of the application and impact of UV/VUV light in
advanced interconnect technology. UV light application in BEOL historically was mainly …