Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: A Petri net approach

MC Zhou - IEEE Transactions on Semiconductor Manufacturing, 1998 - ieeexplore.ieee.org
This paper presents a Petri net approach to modeling, analysis, simulation, scheduling, and
control of semiconductor manufacturing systems. These systems can be characterized as …
被引用次数：384 相关文章

[引用][C] Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: A Petri net approach: Special section on Petri nets in …

M ZHOU, MD JENG - IEEE transactions on semiconductor …, 1998 - pascal-francis.inist.fr
Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing
systems : A Petri net approach : Special section on Petri nets in semiconductor manufacturing …

[引用][C] Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: A Petri net approach

MC Zhou, MD Jeng - Ieee Transactions on Semiconductor …, 1998 - scholars.ntou.edu.tw
Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems:
A Petri net approach | National Taiwan Ocean University Research Hub Skip navigation 中文 …

Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: A petri net approach

MC Zhou, M Der Jeng - IEEE Transactions on Semiconductor …, 1998 - researchwith.njit.edu
This paper presents a Petri net approach to modeling, analysis, simulation, scheduling, and
control of semiconductor manufacturing systems. These systems can be characterized as …

[引用][C] Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: A Petri Net approach

M ZHOU - IEEE Trans. Semiconduct. Man., 1998 - cir.nii.ac.jp
Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing
systems: A Petri Net approach | CiNii Research CiNii 国立情報学研究所 学術情報ナビゲータ[サイニィ …

[引用][C] Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: A Petri net approach: Special section on Petri nets in …

M ZHOU, MD JENG - IEEE …, 1998 - Institute of Electrical and Electronics …