[HTML][HTML] Damage-free plasma etching of porous organo-silicate low-k using micro-capillary condensation above− 50° C
YA Mankelevich, SD Gendt, JF Marneffe - Scientific reports, 2018 - nature.com
The micro-capillary condensation of a new high boiling point organic reagent (HBPO), is
studied in a periodic mesoporous oxide (PMO) with∼ 34% porosity and k-value∼ 2.3. At a …
studied in a periodic mesoporous oxide (PMO) with∼ 34% porosity and k-value∼ 2.3. At a …
Damage-free plasma etching of porous organo-silicate low-k using micro-capillary condensation above-50° c
R Chanson, L Zhang, JF De Marneffe, S Naumov… - Scientific Reports, 2018 - elibrary.ru
The authors acknowledge Dr C. Dussarrat, P. Shen and K. Urabe from Air Liquide
Laboratories for providing the HBPO molecule; K. Maekawa, K. Yatsuda and S. Tahara from …
Laboratories for providing the HBPO molecule; K. Maekawa, K. Yatsuda and S. Tahara from …
Damage-free plasma etching of porous organo-silicate low-k using micro-capillary condensation above− 50° C
R Chanson, L Zhang, S Naumov, YA Mankelevich… - Scientific Reports, 2018 - cir.nii.ac.jp
抄録< jats: title> Abstract</jats: title>< jats: p> The micro-capillary condensation of a new
high boiling point organic reagent (HBPO), is studied in a periodic mesoporous oxide (PMO) …
high boiling point organic reagent (HBPO), is studied in a periodic mesoporous oxide (PMO) …
[PDF][PDF] Damage-free plasma etching of porous organo-silicate low-k using micro-capillary condensation above− 50 C
R Chanson, L Zhang, S Naumov… - Scientific …, 2018 - lirias.kuleuven.be
Methods The present paper describes the micro-capillary condensation properties and
plasma damage mitigation properties of a specific high boiling point organic (HBPO) …
plasma damage mitigation properties of a specific high boiling point organic (HBPO) …
Damage-free plasma etching of porous organo-silicate low-k using micro-capillary condensation above-50° C.
R Chanson, L Zhang, S Naumov, YA Mankelevich… - Scientific …, 2018 - europepmc.org
The micro-capillary condensation of a new high boiling point organic reagent (HBPO), is
studied in a periodic mesoporous oxide (PMO) with~ 34% porosity and k-value~ 2.3. At a …
studied in a periodic mesoporous oxide (PMO) with~ 34% porosity and k-value~ 2.3. At a …
[引用][C] Damage-free plasma etching of porous organo-silicate low-k using micro-capillary condensation above− 50° C
R Chanson, L Zhang, S Naumov, Y Mankelevich… - Scientific Reports, 2018 - hal.science
Damage-free plasma etching of porous organo-silicate low-k using micro-capillary
condensation above −50 C - Archive ouverte HAL Accéder directement au contenu …
condensation above −50 C - Archive ouverte HAL Accéder directement au contenu …
Damage-free plasma etching of porous organo-silicate low-k using micro-capillary condensation above-50° C
R Chanson, L Zhang, S Naumov… - Scientific …, 2018 - pubmed.ncbi.nlm.nih.gov
The micro-capillary condensation of a new high boiling point organic reagent (HBPO), is
studied in a periodic mesoporous oxide (PMO) with∼ 34% porosity and k-value∼ 2.3. At a …
studied in a periodic mesoporous oxide (PMO) with∼ 34% porosity and k-value∼ 2.3. At a …
[引用][C] Damage-free plasma etching of porous organo-silicate low-k using micro-capillary condensation above− 50° C
R Chanson, L Zhang, S Naumov, Y Mankelevich… - Scientific …, 2018 - inria.hal.science
Damage-free plasma etching of porous organo-silicate low-k using micro-capillary condensation
above −50 C - Inria - Institut national de recherche en sciences et technologies du numérique …
above −50 C - Inria - Institut national de recherche en sciences et technologies du numérique …
[引用][C] Damage-free plasma etching of porous organo-silicate low-k using micro-capillary condensation above-50° C
R Chanson, L Zhang, S Naumove, Y Mankelevich… - 2018 - imec-publications.be
Damage-free plasma etching of porous organo-silicate low-k using micro-capillary condensation
above -50 C Toggle navigation My submissions Login Toggle navigation View item imec …
above -50 C Toggle navigation My submissions Login Toggle navigation View item imec …
Damage-free plasma etching of porous organo-silicate low-k using micro-capillary condensation above-50° C
R Chanson, L Zhang, S Naumov… - Scientific …, 2018 - ui.adsabs.harvard.edu
The micro-capillary condensation of a new high boiling point organic reagent (HBPO), is
studied in a periodic mesoporous oxide (PMO) with∼ 34% porosity and k-value∼ 2.3. At a …
studied in a periodic mesoporous oxide (PMO) with∼ 34% porosity and k-value∼ 2.3. At a …