Compact multi-physics models for large-displacement multilayer cantilevers in RF MEMS circuits, antennas and sensors

JI Kim - 2008 - search.proquest.com
We demonstrate compact analytical multi-physics models that accurately predict the
deformed shape of a variety of multilayer cantilevers and the associated electrical …
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Compact multi-physics models for large-displacement multilayer cantilevers in RF MEMS circuits, antennas and sensors

JI Kim - 2008 - docs.lib.purdue.edu
We demonstrate compact analytical multi-physics models that accurately predict the
deformed shape of a variety of multilayer cantilevers and the associated electrical …