[HTML][HTML] Fluorine-based plasmas: main features and application in micro-and nanotechnology and in surface treatment
C Cardinaud - Comptes Rendus Chimie, 2018 - Elsevier
Fluorine cold plasmas produced by an electrical discharge in SF 6, CF 4, CHF 3 or C 4 F 8
gases, principally, have two main fields of application. The first and historical application is …
gases, principally, have two main fields of application. The first and historical application is …
[HTML][HTML] Fluorine-based plasmas: Main features and application in micro-and nanotechnology and in surface treatment
C Cardinaud - Comptes Rendus. Chimie, 2018 - comptes-rendus.academie-sciences …
Résumé Fluorine cold plasmas produced by an electrical discharge in SF 6, CF 4, CHF 3 or
C 4 F 8 gases, principally, have two main fields of application. The first and historical …
C 4 F 8 gases, principally, have two main fields of application. The first and historical …
[引用][C] Fluorine-based plasmas: Main features and application in micro-and nanotechnology and in surface treatment
C Cardinaud - Comptes Rendus. Chimie, 2018 - hal.science
Fluorine-based plasmas: Main features and application in micro-and nanotechnology and in
surface treatment - Archive ouverte HAL Accéder directement au contenu Documentation FR …
surface treatment - Archive ouverte HAL Accéder directement au contenu Documentation FR …
[PDF][PDF] Fluorine-based plasmas: Main features and application in micro-and nanotechnology and in surface treatment
C Cardinaud - 1982 - researchgate.net
abstract Fluorine cold plasmas produced by an electrical discharge in SF6, CF4, CHF3 or
C4F8 gases, principally, have two main fields of application. The first and historical …
C4F8 gases, principally, have two main fields of application. The first and historical …
[HTML][HTML] Fluorine-based plasmas: Main features and application in micro-and nanotechnology and in surface treatment
C Cardinaud - Comptes Rendus. Chimie, 2018 - comptes-rendus.academie-sciences …
Résumé Fluorine cold plasmas produced by an electrical discharge in SF 6, CF 4, CHF 3 or
C 4 F 8 gases, principally, have two main fields of application. The first and historical …
C 4 F 8 gases, principally, have two main fields of application. The first and historical …
[PDF][PDF] Fluorine-based plasmas: Main features and application in micro-and nanotechnology and in surface treatment
C Cardinaud - 1982 - researchgate.net
abstract Fluorine cold plasmas produced by an electrical discharge in SF6, CF4, CHF3 or
C4F8 gases, principally, have two main fields of application. The first and historical …
C4F8 gases, principally, have two main fields of application. The first and historical …