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[HTML][HTML] Recent advances in reactive ion etching and applications of high-aspect-ratio microfabrication

M Huff - Micromachines, 2021 - mdpi.com
This paper reviews the recent advances in reaction-ion etching (RIE) for application in high-
aspect-ratio microfabrication. High-aspect-ratio etching of materials used in micro-and …
被引用次数：137 相关文章
[HTML] nih.gov

[HTML][HTML] Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication

M Huff - Micromachines, 2021 - ncbi.nlm.nih.gov
This paper reviews the recent advances in reaction-ion etching (RIE) for application in high-
aspect-ratio microfabrication. High-aspect-ratio etching of materials used in micro-and …
[PDF] semanticscholar.org

[PDF][PDF] Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication

M Huff - 2021 - pdfs.semanticscholar.org
This paper reviews the recent advances in reaction-ion etching (RIE) for application in high-
aspect-ratio microfabrication. High-aspect-ratio etching of materials used in micro-and …

Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication

M Huff - Micromachines, 2021 - pubmed.ncbi.nlm.nih.gov
This paper reviews the recent advances in reaction-ion etching (RIE) for application in high-
aspect-ratio microfabrication. High-aspect-ratio etching of materials used in micro-and …

Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication

M Huff - Micromachines, 2021 - search.proquest.com
This paper reviews the recent advances in reaction-ion etching (RIE) for application in high-
aspect-ratio microfabrication. High-aspect-ratio etching of materials used in micro-and …

Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication.

M Huff - Micromachines, 2021 - search.ebscohost.com
This paper reviews the recent advances in reaction-ion etching (RIE) for application in high-
aspect-ratio microfabrication. High-aspect-ratio etching of materials used in micro-and …

Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication.

M Huff - Micromachines, 2021 - europepmc.org
This paper reviews the recent advances in reaction-ion etching (RIE) for application in high-
aspect-ratio microfabrication. High-aspect-ratio etching of materials used in micro-and …

Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication

M Huff - Micromachines, 2021 - cir.nii.ac.jp
抄録< jats: p> This paper reviews the recent advances in reaction-ion etching (RIE) for
application in high-aspect-ratio microfabrication. High-aspect-ratio etching of materials used …