Three-axes monolithic silicon low-g accelerometer

Journal of Microelectromechanical systems, 2000 - ieeexplore.ieee.org
In this paper, four different designs for a new three-axes monolithic low-g acceleration
sensor are presented. The silicon spring mass system of the sensor is fabricated in a single …
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[引用][C] Three-axes monolithic silicon low-g accelerometer

S BÜTEFISCH, A SCHOFT… - Journal of …, 2000 - pascal-francis.inist.fr
Three-axes monolithic silicon low-g accelerometer CNRS Inist Pascal-Francis CNRS
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[引用][C] Three-axes monolithic silicon low-g accelerometer

S BÜTEFISCH, A SCHOFT… - Journal of …, 2000 - Institute of Electrical and Electronics …