Comprehensive review of low pull-in voltage RF NEMS switches

R Chaudhary, PR Mudimela - Microsystem Technologies, 2023 - Springer
The present study focuses on state-of-the-art of the demand, operating principles, design
parameters, different materials for beam and dielectric, already existing technologies and …
被引用次数：7 相关文章

Comprehensive review of low pull-in voltage RF NEMS switches

R Chaudhary, PR Mudimela - Microsystem Technologies, 2023 - dl.acm.org
The present study focuses on state-of-the-art of the demand, operating principles, design
parameters, different materials for beam and dielectric, already existing technologies and …