Silicon nitride in silicon photonics
DJ Blumenthal, R Heideman… - Proceedings of the …, 2018 - ieeexplore.ieee.org
The silicon nitride (Si 3 N 4) planar waveguide platform has enabled a broad class of low-
loss planar-integrated devices and chip-scale solutions that benefit from transparency over a …
loss planar-integrated devices and chip-scale solutions that benefit from transparency over a …
[PDF][PDF] Silicon Nitride in Silicon Photonics
DJ Blumenthal, R Heideman, D Geuzebroek, A Leinse… - ieeexplore.ieee.org
The silicon nitride (Si3N4) planar waveguide plat-form has enabled a broad class of low loss
planar integrated devices and chip-scale solutions that benefit from transparency over a …
planar integrated devices and chip-scale solutions that benefit from transparency over a …
[PDF][PDF] Silicon Nitride in Silicon Photonics
DJ Blumenthal, R Heideman, D Geuzebroek… - Proceedings of the …, 2018 - escholarship.org
The silicon nitride (Si3N4) planar waveguide platform has enabled a broad class of low-loss
planar-integrated devices and chip-scale solutions that benefit from transparency over a …
planar-integrated devices and chip-scale solutions that benefit from transparency over a …