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Measurement uncertainty evaluation procedures and applications for various types of multichannel rotating-element spectroscopic ellipsometers

YJ Cho, W Chegal - Optics Express, 2021 - opg.optica.org
A universal measurement uncertainty evaluation procedure is required for different types of
multichannel rotating-element spectroscopic ellipsometers (RE-SEs) used in modern …
被引用次数：3 相关文章

[引用][C] Measurement uncertainty evaluation procedures and applications for various types of multichannel rotating-element spectroscopic ellipsometers

YJ Cho, W Chegal - Optics Express, 2021 - ui.adsabs.harvard.edu
Measurement uncertainty evaluation procedures and applications for various types of
multichannel rotating-element spectroscopic ellipsometers - NASA/ADS Now on home page …

Measurement uncertainty evaluation procedures and applications for various types of multichannel rotating-element spectroscopic ellipsometers

YJ Cho, W Chegal - Optics express, 2021 - pubmed.ncbi.nlm.nih.gov
A universal measurement uncertainty evaluation procedure is required for different types of
multichannel rotating-element spectroscopic ellipsometers (RE-SEs) used in modern …

Measurement uncertainty evaluation procedures and applications for various types of multichannel rotating-element spectroscopic ellipsometers.

YJ Cho, W Chegal - Optics Express, 2021 - europepmc.org
A universal measurement uncertainty evaluation procedure is required for different types of
multichannel rotating-element spectroscopic ellipsometers (RE-SEs) used in modern …