Low actuation voltage silicon carbide RF switches for MEMS above IC

PV Cicek - 2009 16th IEEE International Conference on …, 2009 - ieeexplore.ieee.org
This paper presents a CMOS-compatible RF MEMS technology to build low actuation
voltage switches. SiC increases the stiffness of the switches to improve reliability and …
被引用次数：2 相关文章

[引用][C] Low actuation voltage silicon carbide RF switches for MEMS above IC

PV Cicek, S Mahdavi, F Nabki, MN El-Gamal - 2009 - espace2.etsmtl.ca
Low actuation voltage silicon carbide RF switches for MEMS above IC - Espace ÉTS
ENGLISH Logo La vitrine de diffusion des publications et contributions des chercheurs de l'ÉTS …
[PDF] researchgate.net

[PDF][PDF] Low Actuation Voltage Silicon Carbide RF Switches for MEMS Above IC

PV Cicek, S Mahdavi, F Nabki, MN El-Gamal - researchgate.net
This paper presents a CMOS-compatible RF MEMS technology to build low actuation
voltage switches. SiC increases the stiffness of the switches to improve reliability and …

Low actuation voltage silicon carbide RF switches for MEMS above IC

PV Cicek, S Mahdavi, F Nabki, MN El-Gamal - 2009 16th IEEE International … - infona.pl
This paper presents a CMOS-compatible RF MEMS technology to build low actuation
voltage switches. SiC increases the stiffness of the switches to improve reliability and …

[引用][C] Low actuation voltage silicon carbide RF switches for MEMS above IC

PV Cicek, S Mahdavi, F Nabki, MN El-Gamal - 2009 - espace2.etsmtl.ca
Low actuation voltage silicon carbide RF switches for MEMS above IC - Espace ÉTS
ENGLISH Logo La vitrine de diffusion des publications et contributions des chercheurs de l'ÉTS …