A tunable RF MEMS inductor on silicon incorporating an amorphous silicon bimorph in a low-temperature process

IEEE electron device letters, 2006 - ieeexplore.ieee.org
A novel tunable radio frequency microelectromechanical system inductor based on the
bimorph effect of an amorphous silicon (a-Si) and aluminum structural layer is presented …
被引用次数：89 相关文章

[引用][C] A tunable RF MEMS inductor on silicon incorporating an amorphous silicon bimorph in a low-temperature process

S CHANG, S SIVOTHTHAMAN - IEEE electron device letters, 2006 - pascal-francis.inist.fr
A tunable RF MEMS inductor on silicon incorporating an amorphous silicon bimorph in a low-temperature
process CNRS Inist Pascal-Francis CNRS Pascal and Francis Bibliographic Databases …

A Tunable RF MEMS Inductor on Silicon Incorporating an Amorphous Silicon Bimorph in a Low-Temperature Process

S Chang, S Sivoththaman - IEEE Electron Device Letters, 2006 - infona.pl
A novel tunable radio frequency microelectromechanical system inductor based on the
bimorph effect of an amorphous silicon (a-Si) and aluminum structural layer is presented …

[引用][C] A Tunable RF MEMS Inductor on Silicon Incorporating an Amorphous Silicon Bimorph in a Low-Temperature Process

S Chang, S Sivoth - IEEE Electron Device Letters, 2006 - cir.nii.ac.jp
A Tunable RF MEMS Inductor on Silicon Incorporating an Amorphous Silicon Bimorph in a
Low-Temperature Process | CiNii Research CiNii 国立情報学研究所 学術情報ナビゲータ[サイニィ …

[引用][C] A tunable RF MEMS inductor on silicon incorporating an amorphous silicon bimorph in a low-temperature process

S CHANG, S SIVOTHTHAMAN - IEEE electron …, 2006 - Institute of Electrical and Electronics …