3D nanopore shape control by current-stimulus dielectric breakdown

C Ying, Y Zhang, Y Feng, D Zhou, D Wang… - Applied Physics …, 2016 - pubs.aip.org
We propose a simple and cost-effect method, current-stimulus dielectric breakdown, to
manipulate the 3D shapes of the nanochannels in 20-nm-thick SiNx membranes. Besides …

3D nanopore shape control by current-stimulus dielectric breakdown

C Ying, Y Zhang, Y Feng, D Zhou, D Wang… - Applied Physics …, 2016 - pubs.aip.org
We propose a simple and cost-effect method, current-stimulus dielectric breakdown, to
manipulate the 3D shapes of the nanochannels in 20-nm-thick SiNx membranes. Besides …

3D nanopore shape control by current-stimulus dielectric breakdown

C Ying, Y Zhang, Y Feng, D Zhou, D Wang… - Applied Physics …, 2016 - cir.nii.ac.jp
抄録< jats: p> We propose a simple and cost-effect method, current-stimulus dielectric
breakdown, to manipulate the 3D shapes of the nanochannels in 20-nm-thick SiNx …

3D nanopore shape control by current-stimulus dielectric breakdown

C Ying, Y Zhang, Y Feng, D Zhou… - Applied Physics …, 2016 - ui.adsabs.harvard.edu
We propose a simple and cost-effect method, current-stimulus dielectric breakdown, to
manipulate the 3D shapes of the nanochannels in 20-nm-thick SiNx membranes. Besides …