Pulsed plasma etching for semiconductor manufacturing
DJ Economou - Journal of Physics D: Applied Physics, 2014 - iopscience.iop.org
Power-modulated (pulsed) plasmas have demonstrated several advantages compared to
continuous wave (CW) plasmas. Specifically, pulsed plasmas can result in a higher etching …
continuous wave (CW) plasmas. Specifically, pulsed plasmas can result in a higher etching …
[引用][C] Pulsed plasma etching for semiconductor manufacturing
DJ Economou - Journal of Physics D: Applied Physics, 2014 - cir.nii.ac.jp
[引用][C] Pulsed plasma etching for semiconductor manufacturing
DJ Economou - Journal of Physics. D, Applied Physics, 2014 - osti.gov
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[PDF][PDF] Pulsed plasma etching for semiconductor manufacturing
DJ Economou - J. Phys. D: Appl. Phys, 2014 - chee.uh.edu
Power-modulated (pulsed) plasmas have demonstrated several advantages compared to
continuous wave (CW) plasmas. Specifically, pulsed plasmas can result in a higher etching …
continuous wave (CW) plasmas. Specifically, pulsed plasmas can result in a higher etching …
Pulsed plasma etching for semiconductor manufacturing
DJ Economou - Journal of Physics. D, Applied Physics, 2014 - inis.iaea.org
[en] Power-modulated (pulsed) plasmas have demonstrated several advantages compared
to continuous wave (CW) plasmas. Specifically, pulsed plasmas can result in a higher …
to continuous wave (CW) plasmas. Specifically, pulsed plasmas can result in a higher …
[PDF][PDF] Pulsed plasma etching for semiconductor manufacturing
DJ Economou - J. Phys. D: Appl. Phys, 2014 - che.uh.edu
Power-modulated (pulsed) plasmas have demonstrated several advantages compared to
continuous wave (CW) plasmas. Specifically, pulsed plasmas can result in a higher etching …
continuous wave (CW) plasmas. Specifically, pulsed plasmas can result in a higher etching …
Pulsed plasma etching for semiconductor manufacturing
DJ Economou - Journal of Physics D Applied Physics, 2014 - ui.adsabs.harvard.edu
Power-modulated (pulsed) plasmas have demonstrated several advantages compared to
continuous wave (CW) plasmas. Specifically, pulsed plasmas can result in a higher etching …
continuous wave (CW) plasmas. Specifically, pulsed plasmas can result in a higher etching …
[PDF][PDF] Pulsed plasma etching for semiconductor manufacturing
DJ Economou - J. Phys. D: Appl. Phys, 2014 - chee.uh.edu
Power-modulated (pulsed) plasmas have demonstrated several advantages compared to
continuous wave (CW) plasmas. Specifically, pulsed plasmas can result in a higher etching …
continuous wave (CW) plasmas. Specifically, pulsed plasmas can result in a higher etching …