Pulsed Cl2/Ar inductively coupled plasma processing: 0D model versus experiments

M Darnon - Journal of Physics D: Applied Physics, 2014 - iopscience.iop.org
Comparisons between measurements and spatially-averaged (0D) simulations of low-
pressure Ar and Cl 2 pulsed-plasmas in an industrial inductively coupled reactor are …
被引用次数：22 相关文章
[PDF] researchgate.net

[PDF][PDF] Pulsed Cl2/Ar inductively coupled plasma processing: 0D model versus experiments

E Despiau-Pujo, M Brihoum, P Bodart… - J. Phys. D: Appl …, 2014 - researchgate.net
Comparisons between measurements and spatially-averaged (0D) simulations of low-
pressure Ar and Cl2 pulsed-plasmas in an industrial inductively coupled reactor are …

[引用][C] Pulsed Cl2/Ar inductively coupled plasma processing: 0D model versus experiments

E Despiau-Pujo, M Brihoum, P Bodart… - Journal of Physics D …, 2014 - hal.science
Pulsed Cl2/Ar inductively coupled plasma processing: 0D model versus experiments - Archive
ouverte HAL Accéder directement au contenu Documentation FR Français (FR) Anglais (EN) …

Pulsed Cl2/Ar inductively coupled plasma processing: 0D model versus experiments

E Despiau-Pujo, M Brihoum, P Bodart… - Journal of Physics. D …, 2014 - inis.iaea.org
[en] Comparisons between measurements and spatially-averaged (0D) simulations of low-
pressure Ar and Cl 2 pulsed-plasmas in an industrial inductively coupled reactor are …

[引用][C] Pulsed Cl2/Ar inductively coupled plasma processing: 0D model versus experiments

E Despiau-Pujo, M Brihoum… - Journal of Physics …, 2014 - hal.univ-grenoble-alpes.fr
Pulsed Cl2/Ar inductively coupled plasma processing: 0D model versus experiments -
Université Grenoble Alpes Accéder directement au contenu Documentation FR Se connecter …

Pulsed Cl {sub 2}/Ar inductively coupled plasma processing: 0D model versus experiments

E Despiau-Pujo, M Brihoum, P Bodart, M Darnon… - Journal of Physics. D …, 2014 - osti.gov
Comparisons between measurements and spatially-averaged (0D) simulations of low-
pressure Ar and Cl {sub 2} pulsed-plasmas in an industrial inductively coupled reactor are …

Pulsed Cl2/Ar inductively coupled plasma processing: 0D model versus experiments

E Despiau-Pujo, M Brihoum, P Bodart… - Journal of Physics …, 2014 - ui.adsabs.harvard.edu
Comparisons between measurements and spatially-averaged (0D) simulations of low-
pressure Ar and Cl 2 pulsed-plasmas in an industrial inductively coupled reactor are …

[引用][C] Pulsed Cl2/Ar inductively coupled plasma processing: 0D model versus experiments

E Despiau-Pujo, M Brihoum… - Journal of Physics …, 2014 - hal.univ-grenoble-alpes.fr
Pulsed Cl2/Ar inductively coupled plasma processing: 0D model versus experiments -
Université Grenoble Alpes Accéder directement au contenu Documentation FR Se connecter …