Suspended cantilever waveguide

L Chen, C Doerr, L Chen - US Patent 11,221,447, 2022 - Google Patents
US11221447B1 - Suspended cantilever waveguide - Google Patents US11221447B1 -
Suspended cantilever waveguide - Google Patents Suspended cantilever waveguide …
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Suspended cantilever waveguide

L Chen, C Doerr, L Chen - US Patent 11,221,447, 2022 - freepatentsonline.com
Cantilevered waveguides suspended above an air cavity in an underlying substrate are
described. The waveguide is formed by patterning a waveguide layer in some embodiments …