Evidence of relationship between strain and In-incorporation: Growth of N-polar In-rich InAlN buffer layer by OMCVD

P Chauhan, S Hasenöhrl, E Dobročka… - Journal of Applied …, 2019 - pubs.aip.org
Two I nx A l 1− x N layers were grown simultaneously on different substrates [sapphire
(0001) and the Ga-polar GaN template], but under the same reactor conditions, they were …

Structural properties of m-plane InAlN films grown on ZnO substrates with room-temperature GaN buffer layers

T Kajima, A Kobayashi, K Ueno, J Ohta… - Applied Physics …, 2013 - iopscience.iop.org
The growth of m-plane In x A 1-x N (0.34< x< 0.89) films was achieved using ZnO (1100)
substrates and pulsed-laser-deposited room-temperature-commensurate GaN buffer layers …

Growth of 300-nm-thick epitaxial AlInN films on a semi-relaxed c-plane GaInN template by metalorganic chemical vapor deposition

M Miyoshi, M Yamanaka, T Egawa… - Materials Research …, 2021 - iopscience.iop.org
Metalorganic chemical vapor deposition of approximately 300-nm thick epitaxial AlInN films
with different alloy compositions was performed using a semi-relaxed c-plane GaInN …

Growth evolution of N-polar indium-rich InAlN layer on c-sapphire via strain relaxation by ultrathin AlON interlayer

P Chauhan, S Hasenöhrl, A Minj, MP Chauvat… - Applied Surface …, 2020 - Elsevier
InAlN as a functional inorganic material is a promising alternative to the commonly used
InGaN in tunnel diodes and optoelectronic devices, due to its tunable wider range of energy …

Spatially resolved investigation of strain and composition variations in (In, Ga) N/GaN epilayers

B Wilsch, U Jahn, B Jenichen, J Lähnemann… - Applied Physics …, 2013 - pubs.aip.org
The strain state and composition of a 400 nm thick (In, Ga) N layer grown by metal-organic
chemical vapor deposition on a GaN template are investigated by spatially integrated x-ray …

Growth and characterization of In-polar and N-polar InAlN by metal organic chemical vapor deposition

DF Brown, S Keller, TE Mates, JS Speck… - Journal of Applied …, 2010 - pubs.aip.org
In x Al 1− x N layers, with 0.09≤ x≤ 0.23⁠, were grown on GaN on both the In-polar and N-
polar orientations by metal organic chemical vapor deposition. The impact of growth …

Effect of temperature and carrier gas on the properties of thick InxAl1-xN layer

P Chauhan, S Hasenöhrl, E Dobročka, Ľ Vančo… - Applied Surface …, 2019 - Elsevier
Abstract Thick (> 150 nm) I nx A l 1-x N layers were grown on GaN/sapphire (0 0 0 1) by
organometallic vapor phase epitaxy. Growth temperature of I nx A l 1-x N layers was …

Defect formation mechanism and quality improvement of InAlN epilayers grown by metal–organic chemical vapor deposition

TY Wang, JH Liang, DS Wuu - CrystEngComm, 2015 - pubs.rsc.org
The effect of growth pressure on defect formation in InAlN epilayers grown on GaN/sapphire
templates by metal–organic chemical vapor deposition was systematically investigated in …

A systematic study of MOCVD reactor conditions and Ga memory effect on properties of thick InAl (Ga) N layers: a complete depth-resolved investigation

P Chauhan, S Hasenöhrl, Ľ Vančo, P Šiffalovič… - …, 2020 - pubs.rsc.org
Thick InAlN layers (In-molar fraction> 0.37) on GaN buffer layers were prepared using a
close-coupled showerhead metalorganic chemical vapor deposition (MOCVD) reactor. This …

Indium incorporation dynamics in N-polar InAlN thin films grown by plasma-assisted molecular beam epitaxy on freestanding GaN substrates

MT Hardy, DF Storm, N Nepal, DS Katzer… - Journal of Crystal …, 2015 - Elsevier
N-polar InAlN thin films were grown by plasma-assisted molecular beam epitaxy on
freestanding GaN substrates under N-rich conditions. Indium and aluminum fluxes were …