[HTML][HTML] Redeposition-free inductively-coupled plasma etching of lithium niobate for integrated photonics
Lithium niobate on insulator is being established as a versatile platform for a new generation
of photonic integrated devices. Extensive progress has been made in recent years to …
of photonic integrated devices. Extensive progress has been made in recent years to …
Argon plasma inductively coupled plasma reactive ion etching study for smooth sidewall thin film lithium niobate waveguide application
Lithium Niobate (LN) exhibits unique physical properties such as remarkable electro-optical
coefficients and it is thus an excellent material for a wide range of fields like optic …
coefficients and it is thus an excellent material for a wide range of fields like optic …
Ultra-smooth LiNbO3 micro and nano structures for photonic applications
We report on two approaches to achieve ultra-smooth structures on lithium niobate (LiNbO3)
substrates. The first method relies on ICP-RIE (inductively coupled-reactive ionic etching) or …
substrates. The first method relies on ICP-RIE (inductively coupled-reactive ionic etching) or …
Ultra-low loss ridge waveguides on lithium niobate via argon ion milling and gas clustered ion beam smoothening
Lithium niobate's use in integrated optics is somewhat hampered by the lack of a capability
to create low loss waveguides with strong lateral index confinement. Thin film single crystal …
to create low loss waveguides with strong lateral index confinement. Thin film single crystal …
[HTML][HTML] High-Quality Dry Etching of LiNbO3 Assisted by Proton Substitution through H2-Plasma Surface Treatment
A Aryal, I Stricklin, M Behzadirad, DW Branch… - Nanomaterials, 2022 - mdpi.com
The exceptional material properties of Lithium Niobate (LiNbO3) make it an excellent
material platform for a wide range of RF, MEMS, phononic and photonic applications; …
material platform for a wide range of RF, MEMS, phononic and photonic applications; …
High‐Q Thin‐Film Lithium Niobate Microrings Fabricated with Wet Etching
R Zhuang, J He, Y Qi, Y Li - Advanced Materials, 2023 - Wiley Online Library
Thin‐film lithium niobate (TFLN) has been widely used in electro‐optic modulators, acoustic‐
–optic modulators, electro‐optic frequency combs, and nonlinear wavelength converters …
–optic modulators, electro‐optic frequency combs, and nonlinear wavelength converters …
Integrated photonics on the dielectrically loaded lithium niobate on insulator platform
Thin-film lithium niobate on insulator (LNOI) is emerging as one of the promising platforms
for integrated photonics due to the excellent material properties of lithium niobate, which …
for integrated photonics due to the excellent material properties of lithium niobate, which …
[HTML][HTML] A heterogeneously integrated lithium niobate-on-silicon nitride photonic platform
M Churaev, RN Wang, A Riedhauser, V Snigirev… - Nature …, 2023 - nature.com
The availability of thin-film lithium niobate on insulator (LNOI) and advances in processing
have led to the emergence of fully integrated LiNbO3 electro-optic devices. Yet to date …
have led to the emergence of fully integrated LiNbO3 electro-optic devices. Yet to date …
Femtosecond laser assisted selective etching of microchannels in lithium niobate
Here, we report on the fabrication of cm-long microchannels in LiNbO_3 by selective etching
of femtosecond laser inscribed tracks using hydrofluoric acid. We achieved a 1? cm long …
of femtosecond laser inscribed tracks using hydrofluoric acid. We achieved a 1? cm long …
On-chip erbium-doped lithium niobate waveguide amplifiers
Lithium niobate on insulator (LNOI), as an emerging and promising optical integration
platform, faces shortages of on-chip active devices including lasers and amplifiers. Here, we …
platform, faces shortages of on-chip active devices including lasers and amplifiers. Here, we …