This paper presents a CMOS-compatible RF MEMS technology to build low actuation
voltage switches. SiC increases the stiffness of the switches to improve reliability and …

The RF MEMS switches with low noise and high performance are the most prevalent and
have shown superior Figures of Merit compared to their semiconductor counterparts, for …

Mobile technologies have relied on RF switches for a long time. Though the basic function of
the switch has remained the same, the way they have been made has changed in the recent …

Microelectromechanical Systems (MEMS) for radio frequency (RF) applications or RF MEMS
provides an opportunity to revolutionize the wireless communication. This paper describes …

The increasing demand for low loss, high Q devices for high frequency applications has led
to the development of MEMS components in the RF domain. RF MEMS has evolved over the …

In modern telecommunication and space electronic applications, RF MEMS switch
components offer great potential benefits such as high isolation, low insertion loss, low …

This paper describes the process, design the switch structures and simulate certain
parameters to develop a high performance RF MEMS switch with low voltage, low loss and …

This research presents a novel MEMS-switches that fabricated with CMOS and post-process
techniques of MEMS. This switch includes a controllable cantilever beam and static …

RF-MEMS switching concepts for high power applications Page 1 Volt Watt Ohm RP U R U R U
UI P eff 31 10 502 2 2 0 2 0 2 = • • = = = = = Ω = 50 R 2 = U U o eff Abstract-- RF MEMS switches …

This paper reviews the recent progress in MEMS for radio frequency (RF) switches. Several
structures were designed, fabricated and tested in the background of S-band application …