This paper demonstrates electrical results of an integrated Si CMOS-electrostatically
actuated nanoelectromechanical (NEM) relay circuit. This is an initial step towards realizing …

Electrostatically actuated nanoelectromechanical (NEM) relays are integrated with silicon
nMOS devices. An nMOSFET successfully drives a NEM relay with the MOSFET serving as a …

The operation and performance of complementary nanoelectromechanical (CNEM) logic
gates are investigated. NEMS structures featuring dimensions 2 to 3 orders of magnitude …

This paper reports on the modeling, fabrication, and testing of cantilever-and parallel plate-
based laterally actuated platinum-coated polysilicon nanoelectromechanical (NEM) relays …

Laterally actuated polycrystalline silicon nanoelectromechanical (NEM) relays with
enhanced electrical properties are presented. Due to surface oxidation of polysilicon in room …

Digital circuits based on nanoelectromechanical (NEM) relays hold out the potential of
providing an energy efficiency unachievable by conventional CMOS technology. This paper …

Integrated nanoelectromechanical (NEM) relays can be used instead of transistors to
implement ultra-low power logic circuits, due to their abrupt turn off characteristics and zero …

We present a hybrid nanoelectromechanical (NEM)/CMOS static random access memory
(SRAM) cell, in which the two pull-down transistors of a conventional CMOS six transistor …

Integration of nano-electro-mechanical switches (NEMS) with CMOS technology has been
proposed to exploit both near zero-leakage characteristics of NEMS devices along with high …

This paper reports on lateral nanoelectromechanical (NEM) relays based on variations of a
two-or three-mask titanium nitride (TiN) sidewall stringer process. Electrically isolated TiN …