Design, fabrication, and complementary metal-oxide-semiconductor (CMOS) integration of micro-electro-mechanical systems (MEMS) humidity sensors
T Saha - 2013 - escholarship.mcgill.ca
La conception, le microfabrication, et l'intégration de CMOS des sondes capacitives micro-
électro-mécaniques d'humidité des systèmes (MEMS) sont présentés dans ce travail …
électro-mécaniques d'humidité des systèmes (MEMS) sont présentés dans ce travail …
Fabrication and characterization of a CMOS-MEMS humidity sensor
This paper reports on the fabrication and characterization of a Complementary Metal Oxide
Semiconductor-Microelectromechanical System (CMOS-MEMS) device with embedded …
Semiconductor-Microelectromechanical System (CMOS-MEMS) device with embedded …
MEMS-based humidity sensors with integrated temperature sensors for signal drift compensation
CY Lee, GB Lee - SENSORS, 2003 IEEE, 2003 - ieeexplore.ieee.org
Humidity sensing is essential in such fields as environmental control, process monitoring
and biomedical analysis. A microfabricated humidity sensor is developed which uses a …
and biomedical analysis. A microfabricated humidity sensor is developed which uses a …
Design of a low-cost MEMS monolithically-integrated relative humidity sensor
This paper presents MEMS capacitive-based humidity sensors for monolithic integration with
CMOS electronics. The fabrication process and design of the sensors are described …
CMOS electronics. The fabrication process and design of the sensors are described …
Conception d'un microcapteur de pression, Humidité et température en technologie MEMS.
S Annane - 2011 - fsbsa.ummto.dz
Les microsystèmes (MEMS–Micro Eléctro-Mécanical–System) sont des composants
miniaturisés réunissant des fonctions électroniques, mécaniques et optiques sur la même …
miniaturisés réunissant des fonctions électroniques, mécaniques et optiques sur la même …
CMOS-MEMS technologies for the applications of environment sensors and environment sensing hubs
The booming growth in environmental conditions sensing and monitoring pushes the need
of inexpensive environment sensors with small size and low power consumption. The …
of inexpensive environment sensors with small size and low power consumption. The …
Techniques in MEMS devices for micro humidity sensors and their applications
CY Lee, CH Lin, LM Fu - MEMS/NEMS: Handbook Techniques and …, 2006 - Springer
As microfabrication technologies mature, the use of microsensors to detect acceleration,
pressure, fluid flow and angular rate variation is becoming increasingly common. These …
pressure, fluid flow and angular rate variation is becoming increasingly common. These …
Designing a robust high-speed CMOS-MEMS capacitive humidity sensor
In our previous work (Lazarus and Fedder 2011 J. Micromech. Microeng. 21 0650281), we
demonstrated a CMOS-MEMS capacitive humidity sensor with a 72% improvement in …
demonstrated a CMOS-MEMS capacitive humidity sensor with a 72% improvement in …
MEMS-based humidity sensor with integrated temperature compensation mechanism
LT Chen, CY Lee, WH Cheng - Sensors and Actuators A: Physical, 2008 - Elsevier
This study applies conventional micro-electro-mechanical systems (MEMS) techniques to
develop a novel low-cost humidity sensor comprising a silicon substrate, a freestanding …
develop a novel low-cost humidity sensor comprising a silicon substrate, a freestanding …
A CMOS MEMS humidity sensor enhanced by a capacitive coupling structure
JQ Huang, B Li, W Chen - Micromachines, 2016 - mdpi.com
A capacitive coupling structure is developed to improve the performances of a capacitive
complementary metal oxide semiconductor (CMOS) microelectromechanical system …
complementary metal oxide semiconductor (CMOS) microelectromechanical system …