Orientation Zernike polynomials: a useful way to describe the polarization effects of optical imaging systems

J Ruoff, M Totzeck - Journal of Micro/Nanolithography, MEMS …, 2009 - spiedigitallibrary.org
We introduce the new concept of orientation Zernike polynomials, a base function
representation of retardation and diattenuation in close analogy to the wavefront description …

Using orientation Zernike polynomials to predict the imaging performance of optical systems with birefringent and partly polarizing components

J Ruoff, M Totzeck - International Optical Design Conference, 2010 - opg.optica.org
Using Orientation Zernike Polynomials to predict the imaging performance of optical systems
with birefringent and partly polariz Page 1 Using Orientation Zernike Polynomials to predict the …

Polarization influence on imaging

M Totzeck, P Gräupner, T Heil… - Journal of Micro …, 2005 - spiedigitallibrary.org
We give a general introduction into polarized imaging and report on a Jones pupil approach
for a complete evaluation of the resulting optical performance. The Jones pupil assigns a …

How to describe polarization influence on imaging

M Totzeck, P Graupner, T Heil… - Optical …, 2005 - spiedigitallibrary.org
We give a general introduction into polarized imaging and report on a Jones-pupil approach
for a complete evaluation of the resulting optical performance. The Jones pupil assigns a …

Orthonormal vector polynomials in a unit circle, Part II: completing the basis set

C Zhao, JH Burge - Optics Express, 2008 - opg.optica.org
Zernike polynomials provide a well known, orthogonal set of scalar functions over a circular
domain, and are commonly used to represent wavefront phase or surface irregularity. A …

Double expansion of wavefront deformation in Zernike polynomials over the pupil and the field-of-view of optical systems: lens design, testing, and alignment

I Agurok - Proc. SPIE, 1998 - spiedigitallibrary.org
The double expansion of wavefront deformation in Zernike polynomials over the pupil and
the field-of-view is a promising approach for lens design, testing, and alignment …

Orthonormal polynomials in wavefront analysis: analytical solution

VN Mahajan, G Dai - JOSA A, 2007 - opg.optica.org
Zernike circle polynomials are in widespread use for wavefront analysis because of their
orthogonality over a circular pupil and their representation of balanced classical aberrations …

Polarization aberrations in hyper-numerical-aperture projection printing: a comparison of various representations

GR McIntyre, J Kye, H Levinson… - Journal of Micro …, 2006 - spiedigitallibrary.org
Various representations of polarization aberrations are described and compared for optical
lithography. Polarization aberrations, which are potentially important with hyper-numerical …

Orthogonal polynomials describing polarization aberration for rotationally symmetric optical systems

X Xu, W Huang, M Xu - Optics Express, 2015 - opg.optica.org
Optical lithography has approached a regime of high numerical aperture and wide field,
where the impact of polarization aberration on imaging quality turns to be serious. Most of …

An analytic expression for the field dependence of Zernike polynomials in rotationally symmetric optical systems

RW Gray, C Dunn, KP Thompson, JP Rolland - Optics Express, 2012 - opg.optica.org
Zernike polynomials have emerged as the preferred method of characterizing as-fabricated
optical surfaces with circular apertures. Over time, they have come to be used as a sparsely …