Dans cette partie, les différents phénomènes physiques qui permettent de mettre en
mouvement un MEMS sont explicités. On appelle «actionneur» la partie du MEMS à l'origine …

Les commutateurs mécaniquement bistables présentés dans la littérature possèdent
généralement un contact électrique de type latéral; la métallisation de ce type de contact se …

The aim of this paper is to design and analyze a Bistable MEMS switch which consumes
energy only during the state transition. That means, when the switch is at one of its stable …

MEMS switches include mobile beams in their mechanical structure and these suspended
parts are essential for the device functioning. This paper illustrates the most important …

During the past decade, several new fabrication techniques have evolved which popularize
micro electromechanical systems (MEMS), and many novel devices have been reported in …

Abstract Micro-Electro Mechanical System (MEMS) is an agglomeration of submicron
mechanical moving parts and electronic components on a single module. MEMS devices …

An overview of the MEMS technology development and applications is given in this paper. A
special attention is paid to the RF MEMS switches. Both series and shunt MEMS switches …

Research on MEMS (Micro Electro Mechanical systems) has seen an amazing growth
during the last 15 years, stimulated both by their interesting physical properties and their …

The design, fabrication, and an experiment, of a bistable MEMS switch with magnetostatic
latching and electrothermal actuation for achieving lower power consumption are presented …

Micro-Electro-Mechanical Systems (MEMS) switches have emerged as promising
alternatives to conventional electronic switches due to their compact size, low power …