A simplified fuzzy model to mimic a nonlinear system, applied to a plasma source

Z Zhang, J Rayner, A Cheetham… - IEEE Transactions on …, 1997 - ieeexplore.ieee.org
This paper develops a fuzzy model to simulate the behaviour of a nonlinear system, in
particular a plasma source, with a view to developing a control system for processing …

Simulation of a Helicon plasma source using a multivariable fuzzy model

Z Zhang, JP Rayner, AD Cheetham… - IEEE transactions on …, 1998 - ieeexplore.ieee.org
This paper reports work on the development of an automatic control system for a Helicon
plasma processing source. The lack of a definitive physical model for the plasma physics of …

A neural network plasma model of semiconductor manufacturing equipment

B Kim, GT Park, CK Lee - FUZZ-IEEE'99. 1999 IEEE …, 1999 - ieeexplore.ieee.org
Plasma variables such as electron density and radicals provide valuable insight into the
fundamental physics of rf discharge while contributing to equipment optimization and …

Fuzzy-logic-based plasma-position controller for STOR-M

JE Morelli, A Hirose, HC Wood - IEEE transactions on control …, 2005 - ieeexplore.ieee.org
The successful operation of a tokamak fusion reactor rests on its ability to stably confine a
very hot plasma. The quality of the discharge in the Saskatchewan TORus-Modified (STOR …

[PDF][PDF] Plasma position control in the STOR-M Tokamak: A fuzzy logic approach

JE Morelli - 2003 - harvest.usask.ca
Adequate control of the position of the plasma column within the STOR-M tokamak is a chief
requirement in order for experimental quality discharges to be obtained. Optimal control over …

A fuzzy-neural approach to real time plasma boundary reconstruction in tokamak reactors

FC Morabito, M Versaci - Proceedings of International …, 1997 - ieeexplore.ieee.org
A novel plasma shape identification procedure based on both neural network (NN) and
fuzzy system (FS) approaches is presented. The derived processor takes firstly advantage of …

A fuzzy controller design for nuclear research reactors using the particle swarm optimization algorithm

R Coban - Nuclear Engineering and Design, 2011 - Elsevier
In this paper, a closed-loop fuzzy logic controller based on the particle swarm optimization
algorithm is proposed for controlling the power level of nuclear research reactors. The …

Modeling plasma equipment using neural networks

B Kim, GT Park - IEEE transactions on plasma science, 2001 - ieeexplore.ieee.org
Equipment plasma has been modeled semi-empirically using neural networks in
conjunction with statistical experimental design. A 3/sup 3/factorial design was employed to …

Intelligent control of low pressure plasma processing

J Al-Kuzee, T Matsuura, A Goodyear… - IECON'03. 29th …, 2003 - ieeexplore.ieee.org
Several parameters characterize systems for materials processing that use radio frequency
electrical discharges in gases at low pressure. These include directly measurable quantities …

FPGA based Fuzzy Logic Controller for plasma position control in ADITYA Tokamak

P Suratia, J Patel, R Rajpal, S Kotia… - Fusion Engineering and …, 2012 - Elsevier
Tokamaks are the most promising devices for obtaining nuclear fusion energy from high-
temperature, ionized gas termed as Plasma. The successful operation of tokamak depends …