Scanning spreading resistance microscopy (SSRM) with its high spatial resolution and high
dynamic signal range is a powerful tool for two-dimensional characterization of …

The spatial resolution of scanning spreading resistance microscopy (SSRM) has been
investigated experimentally by using dedicated test structures composed of a series of ultra …

Scanning spreading resistance microscopy (SSRM) is a carrier profiling method based on
atomic force microscopy (AFM), which has proven its power for two-dimensional …

Scanning Spreading Resistance Microscopy (SSRM) is now widely used for two-
dimensional doping profiling with high spatial resolution. The need for a high force between …

In this work a new method is presented and developed for quantitative two-dimensional
carrier profiling: scanning spreading resistance microscopy (SSRM). The technique can be …

Scanning spreading resistance microscopy (SSRM) is a powerful technique for quantitative
two-and three-dimensional carrier profiling of semiconductor devices with sub-nm spatial …

A new atomic force microscopy (AFM)-based technique named fast Fourier transform
scanning spreading-resistance microscopy (FFT-SSRM) has been developed. FFT-SSRM …

Abstract Scanning Probe Microscopes (SPMs) offer the combination of high-resolution
topography imaging and measurement of electrical properties. When applied to …

Within this study, the authors have investigated scanning spreading resistance microscopy
(SSRM) measurements on silicon samples under different environmental conditions. The …

Scanning Spreading Resistance Microscopy (SSRM) and Scanning Capacitance
Microscopy (SCM) are two techniques based upon the atomic force microscope (AFM) …