A low actuation voltage electrostatic actuator for RF MEMS switch applications
CH Chu, WP Shih, SY Chung, HC Tsai… - Journal of …, 2007 - iopscience.iop.org
This paper presents the design, fabrication and characterization of an RF MEMS switch. Low
actuation voltage and high isolation of the switch were achieved by exploiting buckling and …
actuation voltage and high isolation of the switch were achieved by exploiting buckling and …
Low voltage driven RF MEMS capacitive switch using reinforcement for reduced buckling
Variation in actuation voltage for RF MEMS switches is observed as a result of stress-
generated buckling of MEMS structures. Large voltage driven RF-MEMS switches are a …
generated buckling of MEMS structures. Large voltage driven RF-MEMS switches are a …
A low-voltage and low-power RF MEMS series and shunt switches actuated by combination of electromagnetic and electrostatic forces
This paper reports new RF microelectromechanical systems (MEMS) switches actuated by
the combination of electromagnetic and electrostatic forces for low-voltage and low-power …
the combination of electromagnetic and electrostatic forces for low-voltage and low-power …
Piezoelectrically actuated RF MEMS DC contact switches with low voltage operation
In this paper, fully integrated radio frequency (RF) microelectromechanical system (MEMS)
switches with piezoelectric actuation have been proposed, designed, fabricated, and …
switches with piezoelectric actuation have been proposed, designed, fabricated, and …
A novel pull-up type RF MEMS switch with low actuation voltage
SD Lee, BC Jun, SD Kim… - IEEE microwave and …, 2005 - ieeexplore.ieee.org
We report a novel pull-up type radio frequency (RF) microelectromechanical system (MEMS)
switch with no elastic deformation of the cantilever involved in the actuation. At a voltage of …
switch with no elastic deformation of the cantilever involved in the actuation. At a voltage of …
A review on RF micro-electro-mechanical-systems (MEMS) switch for radio frequency applications
This paper is designed to review the MEMS switch by considering key aspects on the basis
of mechanical structure, actuation methods, and types of contact and circuit configurations …
of mechanical structure, actuation methods, and types of contact and circuit configurations …
Design, fabrication and RF performances of two different types of piezoelectrically actuated Ohmic MEMS switches
In this paper, we have proposed, fabricated and characterized piezoelectrically actuated RF
MEMS (radio-frequency micro-electro-mechanical system) switches. They have been …
MEMS (radio-frequency micro-electro-mechanical system) switches. They have been …
Design and modeling of a novel RF MEMS series switch with low actuation voltage
K Khodadady, BA Ganji - Microsystem Technologies, 2016 - Springer
This paper presents the design, analysis, modeling and simulation of a novel RF MEMS
series switches with low actuation voltage. A mechanical modeling is presented to describe …
series switches with low actuation voltage. A mechanical modeling is presented to describe …
Electrostatically driven low-voltage micromechanical RF switches using robust single-crystal silicon actuators
JM Kim, S Lee, JH Park, CW Baek… - Journal of …, 2010 - iopscience.iop.org
In this paper, we demonstrate an electrostatic RF MEMS switch with a low actuation voltage,
which is obtained simply by optimizing the design and fabrication of the robust single-crystal …
which is obtained simply by optimizing the design and fabrication of the robust single-crystal …
High on/off capacitance ratio RF MEMS capacitive switches
H Wei, Z Deng, X Guo, Y Wang… - … of Micromechanics and …, 2017 - iopscience.iop.org
In this paper, high on/off capacitance ratio radio frequency micro-electro-mechanical-
systems (RF MEMS) switches are designed, fabricated, measured and analyzed. Two types …
systems (RF MEMS) switches are designed, fabricated, measured and analyzed. Two types …