A novel multi-actuation CMOS RF MEMS switch
CI Lee, CH Ko, TC Huang - Smart Structures, Devices, and …, 2008 - spiedigitallibrary.org
This paper demonstrates a capacitive shunt type RF MEMS switch, which is actuated by
electro-thermal actuator and electrostatic actuator at the same time, and than latching the …
electro-thermal actuator and electrostatic actuator at the same time, and than latching the …
Design of multi-actuation RF MEMS switch using CMOS process
CI Lee, CH Ko, TC Huang - 2008 3rd International …, 2008 - ieeexplore.ieee.org
This work demonstrates a capacitive RF (radio frequency) MEMS (micro-electromechanical
systems) switch, which is actuated by electro-thermal force and electrostatic force at the …
systems) switch, which is actuated by electro-thermal force and electrostatic force at the …
RF characteristics of dual-actuation CMOS-MEMS RF switches
CH Ko, CI Lee, TC Huang - 2009 59th Electronic Components …, 2009 - ieeexplore.ieee.org
The capacitive type of radio frequency micro-electromechanical systems (RF MEMS) switch
is investigated for low driving voltages and low power consumption. The RF MEMS switch is …
is investigated for low driving voltages and low power consumption. The RF MEMS switch is …
Multiactuation complementary metal-oxide semiconductor radio frequency MEMS switch
CI Lee, CH Ko, TC Huang… - Journal of Micro …, 2010 - spiedigitallibrary.org
A complementary metal-oxide semiconductor (CMOS)-compatible, capacitive, shunt-type
radio frequency MEMS switch design is demonstrated. The switch is actuated by an …
radio frequency MEMS switch design is demonstrated. The switch is actuated by an …
A low loss and power efficient micro-electro-thermally actuated RF MEMS switch for low power and low loss applications
P Zolfaghari, V Arzhang, M Zolfaghari - Microsystem Technologies, 2018 - Springer
A novel laterally and micro-electro-thermally actuated RF MEMS switch is presented in this
paper. Despite many RF MEMS switches requiring continuous actuation voltage to hold the …
paper. Despite many RF MEMS switches requiring continuous actuation voltage to hold the …
A hybrid RF MEMS switch actuated by the combination of bidirectional thermal actuations and electrostatic holding
Radio frequency microelectro-mechanical system (RF MEMS) switches have received
attention due to their higher performances at high frequencies compared with semiconductor …
attention due to their higher performances at high frequencies compared with semiconductor …
A stiff and flat membrane operated DC contact type RF MEMS switch with low actuation voltage
J Kim, S Kwon, H Jeong, Y Hong, S Lee, I Song… - Sensors and Actuators A …, 2009 - Elsevier
RF MEMS switches can be divided into electrostatic, magnetic, thermal, and piezoelectric
types by their actuation mechanisms. Most research has focused on the electrostatic …
types by their actuation mechanisms. Most research has focused on the electrostatic …
Effect of substrate on temperature range and power capacity of RF MEMS capacitive switches
C Palego, F Solazzi, S Halder… - The 40th European …, 2010 - ieeexplore.ieee.org
A robust design of RF MEMS capacitive shunt switches was implemented with a movable
gold membrane, separate and non-contacting actuation pads, and electrostatic actuation …
gold membrane, separate and non-contacting actuation pads, and electrostatic actuation …
RF MEMS switch using silicon cantilevers
JY Choi - EKC2008 Proceedings of the EU-Korea Conference on …, 2008 - Springer
This paper introduces a new concept in RF MEMS switches intended for high RF power
applications. The novel switch architecture employs electrothermal hydraulic microactuators …
applications. The novel switch architecture employs electrothermal hydraulic microactuators …
Design and fabrication of RF MEMS switch by the CMOS process
CL Dai, HJ Peng, MC Liu, CC Wu… - Journal of Applied …, 2005 - jase.tku.edu.tw
This work investigates the fabrication of a RF (ratio frequency) MEMS (micro elector
mechanical system) switch using the standard 0.35 m 2P4M (double polysilicon four metal) …
mechanical system) switch using the standard 0.35 m 2P4M (double polysilicon four metal) …