Carbon incorporation in (AlGa) As,(AlIn) As and (GaIn) As ternary alloys grown by molecular beam epitaxy

HIH Ito, TIT Ishibashi - Japanese journal of applied physics, 1991 - iopscience.iop.org
Carbon incorporation in III-V ternary alloys,(AlGa) As,(AlIn) As and (GaIn) As, for the entire
composition range is investigated using solid-source molecular beam epitaxy. On the binary …

Carbon incorporation in GaAs and AlxGa1−xAs layers grown by molecular‐beam epitaxy

C Giannini, C Gerardi, L Tapfer, A Fischer… - Journal of applied …, 1993 - pubs.aip.org
GaAs: C and Al x Ga1− x As: C films, grown by solid‐source molecular‐beam epitaxy with
doping levels beyond 1019 cm− 3, have been studied by high‐resolution double‐crystal x …

Acceptor doping of (Al, Ga) As using carbon by metalorganic vapor phase epitaxy

MA Tischler, RM Potemski, TF Kuech, F Cardone… - Journal of crystal …, 1991 - Elsevier
Carbon doping of Al x Ga 1− x As with x= 0 to 0.3 has been investigated using
trimethylarsine (TMAs) as the carbon precursor. Carbon concentrations from 5× 10 17 to⋍ …

P-type carbon-doped InGaAs grown by metalorganic molecular beam epitaxy

J Shirakashi, T Yamada, M Qi, S Nozaki… - Japanese journal of …, 1991 - iopscience.iop.org
Abstract Carbon-doped In x Ga 1-x As layers (x= 0∼ 0.96) were grown by metalorganic
molecular beam epitaxy (MOMBE) using trimethylgallium (TMG), solid arsenic (As 4) and …

Molecular beam epitaxy growth of (Al, Ga) As/GaAs heterostructures

TJ Drummond, H Morkoç, AY Cho - Journal of Crystal Growth, 1982 - Elsevier
Abstract Single period (Al, Ga) As/GaAs structures, wherein the GaAs layer is unintentionally
doped and the (Al, Ga) As/GaAs layer is doped with Si, have been grown with molecular …

Growth parameter dependence of background doping level in GaAs, In0. 53Ga0. 47As and AlxGa1− xAs grown by metalorganic molecular beam epitaxy

JL Benchimol, F Alexandre, Y Gao, F Alaoui - Journal of Crystal Growth, 1989 - Elsevier
Abstract GaAs, In 0.53 Ga 0.47 As and Al x Ga 1− x As were grown by metalorganic
molecular beam epitaxy (MOMBE) using triethyl-III sources for group III elements and a solid …

Donor energy level for Se in Ga1−xAlxAs

JJ Yang, LA Moudy, WI Simpson - Applied Physics Letters, 1982 - pubs.aip.org
Electrical properties and the donor energy level in Se‐doped n‐Ga1− x Al x As (0⩽ x⩽ 0.82)
prepared by metalorganic chemical vapor deposition have been investigated. The van der …

Mobility Enhancement in Inverted AlxGa1-xAs/GaAs Modulation Doped Structures and Its Dependence on Donor-Electron Separation

H Morkoç, TJ Drummond, RE Thorne… - Japanese Journal of …, 1981 - iopscience.iop.org
Inverted single period modulation doped Al x Ga 1-x As/GaAs heterostructures with the
binary compound on top of the ternary, exhibiting enhanced electron mobilities, were grown …

Influence of alloy composition, substrate temperature, and doping concentration on electrical properties of Si-doped n-Alx Ga1−x As grown by molecular beam …

H Künzel, K Ploog, K Wünstel, BL Zhou - Journal of Electronic Materials, 1984 - Springer
Capacitance and Hall effect measurements in the temperature range 10-300 K were
performed to evaluate the deep and shallow level characteristics of Si-doped n-Al x Ga-x As …

Carbon tetrachloride doped Al x Ga1−x As grown by metalorganic chemical vapor deposition

BT Cunningham, JE Baker, GE Stillman - Journal of Electronic Materials, 1990 - Springer
A dilute mixture of CCl 4 in H 2 has recently been shown to be a suitable carbon doping
source for obtaining p-type GaAs grown by metalorganic chemical vapor deposition …