Since two decades piezoelectric MEMS resonator research has been making a headway by
leaps and bounds in multiple fronts such as micro/nanofabrication techniques, device and …

The rapid development of the fifth-generation mobile networks (5G) and Internet of Things
(IoT) is inseparable from a large number of miniature, low-cost, and low-power sensors and …

This book is meant to introduce piezoelectric microelectromechanical system (MEMS)
resonators to a broad audience of engineers, graduate students, and researchers with the …

This paper presents a comprehensive literature survey of MEMS based piezoelectric
microphones along with the fabrication processes involved, application domains, and …

Over the past two decades, several advances have been made in micromachined sensors
and actuators. As the field of microelectromechanical systems (MEMS) has advanced, a …

Here's the book to keep handy when you have to overcome obstacles in design, simulation,
fabrication and application of MEMS sensors. This practical guide to design tools and …

Part of the AMN book series, this book covers the principles, modeling and implementation
as well as applications of resonant MEMS from a unified viewpoint. It starts out with the …

Piezoelectric MEMS energy harvesters based on thin films are compact and cost-effective
microgenerators for scavenging environmental vibrations. This technology is promising for …

Over the past few years, microelectromechanical system (MEMS) based on-chip resonators
have shown significant potential for sensing and high frequency signal processing …

Recent demand in wireless communication for miniatur ized, low-power, low-cost, on-chip
and high-Q resonators to be employed in front-end RF filters or as frequency references has …