Role of surface chemistry in semiconductor thin film processing

JG Ekerdt, YM Sun, A Szabo, GJ Szulczewski… - Chemical …, 1996 - ACS Publications
Microelectronics plays a major role in a host of late twentieth century technologies.
Everywhere you look, microprocessors seem to be present. Taking the venerable …

Mechanisms of surface reactions in thin solid film chemical deposition processes

F Zaera - Coordination Chemistry Reviews, 2013 - Elsevier
In this review, key aspects of the surface chemistry associated with atomic layer deposition
(ALD) are discussed. It is argued that, in spite of its central role in defining the efficacy of …

Surface chemistry in the chemical vapor deposition of electronic materials

SM Gates - Chemical reviews, 1996 - ACS Publications
Sophisticated chemical processing allows us to create thin films with selected properties and
to pattern these films with shrinking dimensions and increasing precision. Chemical …

[图书][B] Materials Science in Microelectronics: The relationship between thin film processing and structure

ES Machlin - 2006 - cambridge.org
A flux of atoms, molecules, or molecular fragments impinging on a cold substrate will
condense to form a thin film, a conformation that is a rich source of topics in materials …

Deposition technologies and applications: Introduction and overview

W Kern, KK Schuegraf - Handbook of Thin Film Deposition Processes and …, 2001 - Elsevier
Publisher Summary Deposition technology can well be regarded as the major key to the
creation of devices such as computers, since microelectronic solid-state devices are all …

The chemistry of inorganic precursors during the chemical deposition of films on solid surfaces

ST Barry, AV Teplyakov, F Zaera - Accounts of chemical research, 2018 - ACS Publications
Conspectus The deposition of thin solid films is central to many industrial applications, and
chemical vapor deposition (CVD) methods are particularly useful for this task. For one, the …

[图书][B] Chemical solution deposition of semiconductor films

G Hodes - 2002 - taylorfrancis.com
Discussing specific depositions of a wide range of semiconductors and properties of the
resulting films, Chemical Solution Deposition of Semiconductor Films examines the …

Chemistry of organometallic compounds on silicon: the first step in film growth

JCF Rodríguez‐Reyes… - Chemistry–A European …, 2007 - Wiley Online Library
The continuous decrease in size of electronic devices has reached a critical point at which
the molecular‐level understanding of chemical processes is imperative. Metal‐containing …

Surface reactions in microelectronics process technology

G Levitin, DW Hess - Annual Review of Chemical and …, 2011 - annualreviews.org
Current integrated circuit (IC) manufacturing consists of more than 800 process steps, nearly
all of which involve reactions at surfaces that significantly impact device yield and …

[图书][B] Solution processing of inorganic materials

D Mitzi - 2008 - books.google.com
Discover the materials set to revolutionize the electronics industry The search for electronic
materials that can be cheaply solution-processed into films, while simultaneously providing …