A novel tunable radio frequency microelectromechanical system inductor based on the
bimorph effect of an amorphous silicon (a-Si) and aluminum structural layer is presented …

This paper presents a new implementation of integrated tunable inductors using mutual
inductances activated by micromechanical switches. To achieve a large tuning range and a …

This paper reports on metal-based MEMS tunable capacitors, fabricated in a thin-film
process on high-ohmic silicon. Continuous and reversible tuning has been demonstrated …

In this paper, the design and fabrication of a new radio frequency (RF)
microelectromechanical system (MEMS) switch structure is presented. This RF MEMS switch …

This paper reports on a microfabrication technology for implementing high-performance
passive components suitable for advanced RF front-ends. This technology offers three metal …

This paper outlines the capabilities of RF MEMS tunable microinductors designed using
mechanical displacements that change the magnetic coupling coefficient between circuits …

We have developed a CMOS-compatible micromachining process that allows us to build
high quality, tunable radio frequency inductors. Inductors play a key role in wireless front …

In this work we present a heterogeneous microassembly consisting of a MEMS translation
stage, a copper electroplated solenoid inductor, and a ferromagnetic NiFe core, integrated …

This paper presents a state-of-the-art RF microelectromechanical systems wide-band
miniature tunable filter designed for 6.5-10-GHz frequency range. The differential filter …

Microelectromechanical systems (MEMS)-based radio frequency (RF) components are
being developed for various microwave and millimeter-wave applications. Using standard …