In this paper, four different designs for a new three-axes monolithic low-g acceleration
sensor are presented. The silicon spring mass system of the sensor is fabricated in a single …

A two-axes inclinometer-sensor has been realized by silicon bulk micromachining using
etch compensation for convex corners and electrochemical etch stop for tight thickness …

This paper presents a new kind of laterally capacity sensed accelerometer fabricated with
silicon/glass anodic bonding and the inductively coupled plasma (ICP) high aspect ratio …

In this paper, we present our work developing a family of silicon-on-insulator (SOI)–based
high-g micro-electro-mechanical systems (MEMS) piezoresistive sensors for measurement …

A new accelerometer with a surrounding mass structure is proposed to achieve the extreme
reduction in sensor die size. The sensor has a very high sensitivity due to a high seismic …

A piezoresistive accelerometer with a measurement range of 100g which utilizes the batch
processing advantages of silicon technology is presented. The sensor differentiates itself …

A three-axis piezoresistive acceleroraeter has been fabricated by bulk-micromachining and
SDB (silicon direct bonding) technologies using a polysilicon layer. The results of FEM (finite …

In this paper, a high-shock 2,000 g accelerometer with a plate spring has been designed,
fabricated, and tested. The proposed accelerometer with a plate spring uses a device layer …

A new accelerometer design is presented, which enables accelerations to be measured
along three axes by using only one seismic mass. Two versions have been designed. The …

Working prototypes of a novel 3-axis monolithic silicon accelerometer [1] have been
manufactured at Chalmers University of Technology in co-operation with Saab Combitech …