A state of the art review on Radio Frequency Micro-Electromechanical Systems (RF MEMS)
capacitive switches is reported by considering two key aspects:(1) materials selection …

The micro-electro-mechanical-system switch performance significantly depends on
materials used for the design of different components. The two most important elements of …

This paper presents a comprehensive review of the reliability issues hampering capacitive
RF MEMS switches in their development toward commercialization. Dielectric charging and …

In this review article, the important switch performance parameters such as actuation
voltage, capacitance ratio, radio frequency-scattering parameters (RF S-parameters), the …

This paper is designed to review the MEMS switch by considering key aspects on the basis
of mechanical structure, actuation methods, and types of contact and circuit configurations …

Shunt capacitive radio-frequency microelectromechanical system (RF MEMS) switches were
fabricated on silicon substrate and characterized in the RF domain. Various switch …

In this paper, high on/off capacitance ratio radio frequency micro-electro-mechanical-
systems (RF MEMS) switches are designed, fabricated, measured and analyzed. Two types …

The development of the wireless communication has led to the huge growth of emerging
consumer and military applications of radio frequency (RF), microwave and millimeter wave …

In this paper, we have analyzed the role of dielectric layer and different beam membranes
on the performance parameters of shunt capacitive RF MEMS switch. The investigation …

The performance of radio-frequency microelectromechanical systems (RF-MEMS) is based
on the material and geometry of the switching device. The first step of any design process is …