Correlative approach for atom probe sample preparation of interfaces using plasma focused ion beam without lift-out

VV Rielli, F Theska, S Primig - Microscopy and Microanalysis, 2022 - academic.oup.com
Plasma focused ion beam microscopy (PFIB) is a recent nanofabrication technique that is
suitable for site-specific atom probe sample preparation. Higher milling rates and fewer …

Comparing plasma-FIB and Ga-FIB preparation of atom probe tomography samples

K Fisher, E Marquis - Microscopy and Microanalysis, 2016 - cambridge.org
The site specific lift-out technique has become commonplace for the fabrication of atom
probe tomography (APT) specimens from specific regions of interest such as interfaces and …

Modern focused-ion-beam-based site-specific specimen preparation for atom probe tomography

TJ Prosa, DJ Larson - Microscopy and Microanalysis, 2017 - academic.oup.com
Approximately 30 years after the first use of focused ion beam (FIB) instruments to prepare
atom probe tomography specimens, this technique has grown to be used by hundreds of …

Backside lift-out specimen preparation: Reversing the analysis direction in atom probe tomography

TJ Prosa, D Lawrence, D Olson, DJ Larson… - Microscopy and …, 2009 - cambridge.org
The field of atom probe tomography (APT) has seen a rapid expansion in the types of
materials and device structures that can be analyzed via advances in pulsed-laser atom …

A reproducible method for damage‐free site‐specific preparation of atom probe tips from interfaces

PJ Felfer, T Alam, SP Ringer… - … research and technique, 2012 - Wiley Online Library
Atom probe tomography (APT) is a mass spectrometry method with atomic‐scale spatial
resolution that can be used for the investigation of a wide range of materials. The main …

Focused ion beam sample preparation for atom probe tomography

WR McKenzie, M Emmanuelle, M Paul - 2010 - unsworks.unsw.edu.au
Atom Probe (AP) tomography is maturing into a routine method for the atomic resolution
compositional analysis of metals, semiconductors and some polymers. This is often …

Atom probe sample preparation

I Blum, F Cuvilly, W Lefebvre-Ulrikson - Atom Probe Tomography, 2016 - Elsevier
The drastic improvement of micromanipulation, microwelding, and ion beam milling in
scanning electron microscopy (SEM) has accompanied the development of atom probe …

Focused ion beam-based specimen preparation for atom probe tomography

JY Lee, JP Ahn - Applied Microscopy, 2016 - koreascience.kr
Currently, focused ion beams (FIB) are widely used for specimen preparation in atom probe
tomography (APT), which is a three-dimensional and atomic-scale compositional analysis …

Fabrication of specimens for atom probe tomography using a combined gallium and neon focused ion beam milling approach

FI Allen, PT Blanchard, R Lake… - Microscopy and …, 2023 - academic.oup.com
We demonstrate a new focused ion beam sample preparation method for atom probe
tomography. The key aspect of the new method is that we use a neon ion beam for the final …

Combining structural and chemical information at the nanometer scale by correlative transmission electron microscopy and atom probe tomography

M Herbig, P Choi, D Raabe - Ultramicroscopy, 2015 - Elsevier
In many cases, the three-dimensional reconstructions from atom probe tomography (APT)
are not sufficiently accurate to resolve crystallographic features such as lattice planes, shear …