Investigation of Cu/low-k film delamination in flip chip packages

CJ Zhai, U Ozkan, A Dubey, RC Blish… - 56th Electronic …, 2006 - ieeexplore.ieee.org
Chip-package-interaction (CPI) induced BEoL (back-end-of-line) delamination has emerged
as a major reliability concern with the adoption of Cu/low-k as the mainstream BEoL …

Cu bump flip chip package reliability on 28nm technology

PH Tsao, S Hsu, YL Kuo, JH Chen… - 2016 IEEE 66th …, 2016 - ieeexplore.ieee.org
As Cu bump is widely adopted in microelectronic IC product packages for broader scope of
applications throughout network communication and handheld device, it impacts on the …

Underfill selection for reducing Cu/low-K delamination risk of flip-chip assembly

TH Wang, YS Lai, MJ Wang - 2006 8th Electronics Packaging …, 2006 - ieeexplore.ieee.org
Experimental and numerical studies were conducted to investigate Cu/low-k delamination
potentials of a flip-chip package assembly implemented with different underfills under an …

Warpage improvement for large die flip chip package

B Xiong, MJ Lee, T Kao - 2009 11th Electronics Packaging …, 2009 - ieeexplore.ieee.org
In the case of field programmable gate array (FPGA) chips, as the demand for higher speeds
and enhanced functionality increases, the size of the flip chip die grows accordingly to offer …

Chip-package-interaction modeling of ultra low-k/copper back end of line

XH Liu, TM Shaw, MW Lane, EG Liniger… - 2007 IEEE …, 2007 - ieeexplore.ieee.org
Ultra low-k (ULK, k= 2.4) dielectric has weaker mechanical properties than first generation
low-k films (k= 3.0). The introduction of ULK into advanced back end of lines (BEOL) …

Packaging effects on reliability of Cu/low-k interconnects

G Wang, C Merrill, JH Zhao… - IEEE Transactions on …, 2003 - ieeexplore.ieee.org
Chip-packaging interaction is becoming a critical reliability issue for Cu/low-k chips during
assembly into a plastic flip-chip package. With the traditional TEOS interlevel dielectric being …

Reliability of Cu pillar bumps for flip-chip packages with ultra low-k dielectrics

Y Wang, KH Lu, J Im, PS Ho - 2010 Proceedings 60th …, 2010 - ieeexplore.ieee.org
The reliability of Cu/low k interconnect structures using Cu pillar bumps was investigated in
this paper. First the characteristics related to electromigration (EM) of Cu pillars with Sn-Ag …

Reliability issues for flip-chip packages

PS Ho, G Wang, M Ding, JH Zhao, X Dai - Microelectronics Reliability, 2004 - Elsevier
In this article, we review the reliability issues for plastic flip-chip packages, which have
become an enabling technology for future packaging development. The evolution of area …

Investigation and minimization of underfill delamination in flip chip packages

CJ Zhai, RC Blish, RN Master - IEEE Transactions on Device …, 2004 - ieeexplore.ieee.org
A generalized plane strain condition is assumed for an edge interfacial crack between die
passivation and underfill on an organic substrate flip chip package. C4 solder bumps are …

Flipchip bump integrity with copper/ultra low-k dielectrics for fine pitch flipchip packaging

SW Yoon, V Kripesh, LH Yu, LC Yong… - … (IEEE Cat. No …, 2004 - ieeexplore.ieee.org
As CMOS transistor scaling proceeds into the deep submicron regime, the number of
transistors on high performance, high density ICs is increasing to 45/spl sim/60 millions, in …