Polymers are widely used in optical devices, electronic devices, energy‐harvesting/storage
devices, and sensors, owing to their low weight, excellent flexibility, and simple fabrication …

The demand for precise micro-optical elements and subsystems is increasing drastically,
influenced mainly by the exploding information and communications markets. For many …

Micro/nanotechnology is initiated from the electronics industry. In recent years, it has been
extended to micro/nanoelectromechanic system for producing miniature devices based on …

The continuing trend for producing novel micro-and nanostructured devices and
components in a broad range of materials is a major motivating factor driving the research in …

Micropatterning and nanopatterning with polymers has become a core technology for many
industrially relevant areas and is also recognized as an enabling technology for research …

Microfabrication techniques for highly layered microstructures have attracted much attention,
since highly layered microstructures permit fabrication of three-dimensional (3D) devices …

This thesis describes the fabrication, micro-machining, and characterization of novel
multifunctional nanocomposite polymers for flexible microsystems. Various elastomers …

In this chapter, the fabrication of microstructure components and devices out of metals and
polymers will be described briefly. Influences of the material choice and the basic process …

New micro and nanopatterning technologies have been developed in the last years as less
costly and more flexible alternatives to phtolithograpic processing. These technologies have …

Polymers have assumed the leading role as substrate materials for microfluidic devices in
recent years. They offer a broad range of material parameters as well as material and …