This paper presents a ruthenium metal-contact RF microelectromechanical system switch
based on a corrugated silicon oxide/silicon nitride diaphragm. The corrugations are …

Performances of the metal-to-metal contact radio frequency (RF) MEMS switches largely rely
on the contacts. A novel contact employing the microspring structure is demonstrated in this …

We present improvements in RF microelectromechanical switch design and fabrication that
demonstrated improved lifetimes in cycled switches. First, implementation of RuO 2-Au …

Direct contact, ohmic MEMS switches for RF applications have several advantages over
other conventional switching devices. Advantages include lower insertion loss, higher …

It is well-recognized that MEMS switches, compared to their more traditional solid state
counterparts, have several important advantages for wireless communications. These …

Microelectromechanical systems (MEMS) radio frequency (RF) switches hold great promise
in a myriad of commercial, aerospace, and military applications. However, there is little …

This paper presents an mN-level contact and restoring force RF microelectromechanical
systems metal-contact switch exhibiting high reliability, high linearity, and high power …

This paper presents an electrostatic RF microelectromechanical systems (MEMS) metal
contact switch based on a tethered cantilever topology. The use of tethers results in a design …

Direct contact RF microelectromechanical systems switches have demonstrated excellent
ultrawideband performance from dc to 100 GHz. However, they are prone to failures due to …

A wafer-scale encapsulated DC-contact RF MEMS switch with a stress-reduced corrugated
diaphragm is proposed and developed. The design, fabrication and characterization aspects …