Localized and efficient machining of germanium based on the auto-coupling between picosecond laser irradiation and electrochemical dissolution: Mechanism …

H Zhu, C Wang, S Mao, Z Zhang, D Zhao, K Xu… - Journal of Manufacturing …, 2022 - Elsevier
The auto-coupling effect between picosecond (ps) laser irradiation and electrochemical
dissolution is proposed to achieve localized and efficient dimpling of germanium (Ge), in …

Fabrication of oxide-free dimple structure on germanium via electrochemical jet machining enhanced by opposing laser irradiation

H Zhu, Z Jiang, J Han, V Saetang, K Xu, Y Liu… - Journal of Manufacturing …, 2023 - Elsevier
The electrochemical machining (ECM) of germanium (Ge) wafer can be significantly
improved in terms of efficiency and localization by introducing laser irradiation. However …

Mechanisms and characterization of a novel hybrid laser-enhanced particle laden electrochemical fabrication process for high quality micro-dimples on germanium …

H Zhu, J Han, J Wang, Q Zhang, Z Zhang… - Journal of Materials …, 2024 - Elsevier
The first-generation semiconductor materials represented by silicon (Si) and germanium
(Ge) still hold a dominant position in many fields, including micro-electromechanical systems …

A numerical study of picosecond laser micro-grooving of single crystalline germanium: Mechanism discussion and process simulation

H Zhu, Z Zhang, J Xu, Y Ren, Z Zhu, K Xu… - Journal of Manufacturing …, 2021 - Elsevier
The temperature field evolution and material removal process during picosecond (ps) laser
micro-grooving of single crystalline germanium (Ge) are explored by developing a 2D two …

Electrochemical etching of stainless steel through laser masking

HS Shin, MS Park, BH Kim, CN Chu - … of Micromechanics and …, 2010 - iopscience.iop.org
A new micro patterning process without the need for a mask is proposed in this paper. It is a
combination of laser masking and electrochemical etching. In electrochemical etching …

Stable nanodepth and nanogram level material removal in electrochemically induced chemical etching of fused quartz

L Meng, Y Liu, Y Yan, D Guo, P Zhou - Precision Engineering, 2024 - Elsevier
The minimum and stability of material removal are critical determinants of the accuracy
limitations in precision engineering. This study explores electrochemically induced chemical …

[图书][B] Electrochemical machining of micro-and nanostructures with ultra-short voltage pulses

AL Trimmer - 2005 - search.proquest.com
Creating structures at the micro and nanoscales is a driving force for a diverse group of
technologies that have applications in biology, integrated electronic device fabrication, and …

Toward a better understanding of glass gravity-feed micro-hole drilling with electrochemical discharges

M Jalali, P Maillard, R Wüthrich - Journal of Micromechanics and …, 2009 - iopscience.iop.org
Spark-assisted chemical engraving (SACE) is a flexible, simple and inexpensive method for
machining electrically non-conductive materials. SACE is particularly interesting because of …

Experimental investigation of wire electrical discharge machining of gallium-doped germanium

E Bamberg, D Rakwal - Journal of materials processing technology, 2008 - Elsevier
This paper investigates the electrical discharge machining of gallium-doped p-type
germanium with a relaxation type pulse generator. A series of experiments were performed …

Micropatterning on cylindrical surfaces via electrochemical etching using laser masking

CH Cho, HS Shin, CN Chu - Applied surface science, 2014 - Elsevier
This paper proposes a method of selective electrochemical dissolution on the cylindrical
surfaces of stainless steel shafts. Selective electrochemical dissolution was achieved via …