Direct imaging of the depletion region of an InP junction under bias using scanning voltage microscopy

D Ban, EH Sargent, SJ Dixon-Warren, I Calder… - Applied physics …, 2002 - pubs.aip.org
We directly image an InP p–n junction depletion region under both forward and reverse bias
using scanning voltage microscopy (SVM), a scanning probe microscopy (SPM) technique …

Imaging of a silicon junction under applied bias with scanning capacitance microscopy and Kelvin probe force microscopy

GH Buh, HJ Chung, CK Kim, JH Yi, IT Yoon… - Applied Physics …, 2000 - pubs.aip.org
Scanning capacitance microscopy (SCM) and Kelvin probe force microscopy (KPFM) are
used to image the electrical structure of a silicon pn junction under applied bias. With SCM …

Delineation of semiconductor doping by scanning resistance microscopy

C Shafai, DJ Thomson, M Simard‐Normandin… - Applied physics …, 1994 - pubs.aip.org
A new technique for the two‐dimensional delineation of P‐N junctions is presented using a
scanning resistance microscope (SRM). The SRM uses a conducting probe to perform …

Two‐dimensional delineation of semiconductor doping by scanning resistance microscopy

C Shafai, DJ Thomson… - Journal of Vacuum …, 1994 - pubs.aip.org
A new technique for the two‐dimensional delineation of P–N junctions is presented using a
scanning resistance microscope (SRM). The SRM uses a conducting probe to perform …

Quantitative evaluation of dopant concentration in shallow silicon p–n junctions by tunneling current mapping with multimode scanning probe microscopy

L Bolotov, K Fukuda, H Arimoto, T Tada… - Japanese Journal of …, 2013 - iopscience.iop.org
Quantitative evaluation of the dopant concentration across silicon p–n junctions has been
performed on oxide-passivated surfaces by using tunneling current mapping in the constant …

Direct imaging of a biased junction with conductance mapping

JY Park, ED Williams, RJ Phaneuf - Journal of applied physics, 2002 - pubs.aip.org
We report characterization of Si pn junction arrays using simultaneous conductance imaging
and constant current mode (topographical) scanning tunneling microscopy imaging over a …

Scanning capacitance microscope methodology for quantitative analysis of pn junctions

VV Zavyalov, JS McMurray, CC Williams - Journal of Applied Physics, 1999 - pubs.aip.org
Quantification of dopant profiles in two dimensions 2D for pn junctions has proven to be a
challenging problem. The scanning capacitance microscope SCM capability for pn junction …

Current imaging of cleaved silicon pn junctions with an ultrahigh vacuum scanning tunneling microscope

S Kordić, EJ Van Loenen, AJ Walker - Applied physics letters, 1991 - pubs.aip.org
Current imaging of cleaved two‐dimensional silicon pn junctions with an ultrahigh vacuum
scanning tunneling microscope is presented. In order to be able to distinguish between p …

Auger voltage contrast depth profiling of shallow pn junctions

R Pantel - Applied physics letters, 1983 - pubs.aip.org
A contactless measurement technique for electrical depth profiling of very shallow p‐n
junctions using a scanning Auger microscope is presented. The physical principle is the …

Electrical characterization of an operating Si pn-junction diode with scanning capacitance microscopy and Kelvin probe force microscopy

GH Buh, HJ Chung, JH Yi, IT Yoon, Y Kuk - Journal of Applied Physics, 2001 - pubs.aip.org
Electrical characterization of an operating pn-junction diode is performed with scanning
capacitance microscopy (SCM) and Kelvin probe force microscopy (KPFM) with submicron …