Design and fabrication of AlGaAs-on-insulator microring resonators for nonlinear photonics

C Kim, C Ye, Y Zheng, E Semenova… - IEEE Journal of …, 2022 - ieeexplore.ieee.org
Recent advances in integrated nonlinear material platforms and low-loss optical
microresonators enabled a broad range of chip-scale optical applications, such as optical …

Low-loss high-confinement waveguides and microring resonators in AlGaAs-on-insulator

L Ottaviano, M Pu, E Semenova, K Yvind - Optics Letters, 2016 - opg.optica.org
AlGaAs is a promising material for integrated nonlinear photonics due to its intrinsic high
nonlinearity. However, the challenging fabrication of deep etched AlGaAs devices makes it …

Ultrahigh-Q AlGaAs-on-insulator microresonators for integrated nonlinear photonics

W Xie, L Chang, H Shu, JC Norman, JD Peters… - Optics …, 2020 - opg.optica.org
Aluminum gallium arsenide (AlGaAs) and related III-V semiconductors have excellent
optoelectronic properties. They also possess strong material nonlinearity as well as high …

High-quality-factor AlGaAs-on-sapphire microring resonators

Y Zheng, M Pu, HK Sahoo, E Semenova… - Journal of Lightwave …, 2019 - opg.optica.org
We realize an AlGaAs-on-sapphire platform through-assisted direct wafer bonding and
substrate removal processes. The direct wafer bonding process is optimized concerning the …

Propagation loss in single-mode GaAs-AlGaAs microring resonators: measurement and model

V Van, PP Absil, JV Hryniewicz… - Journal of Lightwave …, 2001 - ieeexplore.ieee.org
We report propagation loss measurements in single-mode GaAs-AlGaAs racetrack
microresonators with bending radii from 2.7/spl mu/m to 9.7/spl mu/m. The experimental data …

[HTML][HTML] Ultra-efficient frequency comb generation in AlGaAs-on-insulator microresonators

L Chang, W Xie, H Shu, QF Yang, B Shen… - Nature …, 2020 - nature.com
Recent advances in nonlinear optics have revolutionized integrated photonics, providing on-
chip solutions to a wide range of new applications. Currently, state of the art integrated …

Transfer printing of AlGaAs-on-SOI microdisk resonators for selective mode coupling and low-power nonlinear processes

J McPhillimy, S May, C Klitis, B Guilhabert… - Optics Letters, 2020 - opg.optica.org
The transfer printing of aluminum gallium arsenide (AlGaAs) microdisk resonators onto a
silicon-on-insulator (SOI) waveguide platform is demonstrated. The integrated resonators …

Efficient frequency comb generation in AlGaAs-on-insulator

M Pu, L Ottaviano, E Semenova, K Yvind - Optica, 2016 - opg.optica.org
The combination of nonlinear and integrated photonics enables Kerr frequency comb
generation in stable chip-based micro-resonators. Such a comb system will revolutionize …

[HTML][HTML] Compact, spatial-mode-interaction-free, ultralow-loss, nonlinear photonic integrated circuits

X Ji, J Liu, J He, RN Wang, Z Qiu… - Communications …, 2022 - nature.com
Multi-mode waveguides are ubiquitously used in integrated photonics. Although interaction
among different spatial waveguide eigenmodes can induce novel nonlinear phenomena …

Exploiting CMOS manufacturing to reduce tuning requirements for resonant optical devices

AV Krishnamoorthy, X Zheng, G Li, J Yao… - IEEE Photonics …, 2011 - ieeexplore.ieee.org
We present manufacturing tolerances of cascaded silicon microring resonators fabricated in
a commercial 130-nm complementary-oxide semiconductor (CMOS) foundry using 193-nm …