Development of a low actuation voltage RF MEMS switch

KS Kiang, HMH Chong, CJ Hwan, LB Lok, K Elgaid… - 2008 - eprints.soton.ac.uk
This paper reports on the design of a novel ultra low actuation voltage, low loss radio
frequency micro-electro-mechanical system (RF MEMS) capacitive shunt switch. The …

Cantilever type radio frequency microelectromechanical systems shunt capacitive switch design and fabrication

K Demirel, E Yazgan, Ş Demir… - Journal of Micro …, 2015 - spiedigitallibrary.org
A new cantilever type radio frequency microelectromechanical systems (RF MEMS) shunt
capacitive switch design and fabrication is presented. The mechanical, electromechanical …

RF MEMS capacitive shunt switch for low loss applications

K Joy, A Swarnkar, MS Giridhar… - Journal of …, 2023 - iopscience.iop.org
Radio frequency (RF) microelectromechanical system capacitive shunt switch with metal-to-
metal contact is designed, fabricated and tested with the aim of having very low insertion …

Tuned dual beam low voltage RF MEMS capacitive switches for X-band applications

ES Shajahan, SM Bhat - 2012 10th IEEE International …, 2012 - ieeexplore.ieee.org
This paper presents a low voltage, low loss tuned RF MEMS (Radio Frequency Micro Electro
Mechanical Systems) capacitive shunt switches for use in X-band. The tunable switch is …

Design of low actuation voltage RF MEMS switch

SP Pacheco, LPB Katehi… - 2000 IEEE MTT-S …, 2000 - ieeexplore.ieee.org
Low-loss microwave microelectromechanical systems (MEMS) shunt switches are reported
that utilize highly compliant serpentine spring folded suspensions together with large area …

A novel low cost spring-less RF MEMS switch prototype

KS Kiang, HMH Chong, M Kraft - Procedia Engineering, 2010 - Elsevier
This work reports on the fabrication process and measurements of a novel radio frequency
microelectromechanical system (RF MEMS) capacitive shunt switch prototype with a …

High-isolation and low-loss RF MEMS shunt switches

H Jaafar, O Sidek, A Miskam… - The Applied …, 2010 - journals.riverpublishers.com
This paper presents the design and simulation of a radio frequency (RF)
microelectromechanical system (MEMS) shunt switch using a three-dimensional RF …

A low-voltage and low-power RF MEMS series and shunt switches actuated by combination of electromagnetic and electrostatic forces

IJ Cho, T Song, SH Baek, E Yoon - IEEE Transactions on …, 2005 - ieeexplore.ieee.org
This paper reports new RF microelectromechanical systems (MEMS) switches actuated by
the combination of electromagnetic and electrostatic forces for low-voltage and low-power …

Design and simulation of radio frequency micro electro mechanical capacitive shunt switches

AG Nair, ES Shajahan - Procedia Computer Science, 2016 - Elsevier
Abstract Radio Frequency Micro ElectroMechanical (RFMEM) switches play an important
role in microwave switching. The demand for low voltage, low insertion loss, high Isolation …

[图书][B] Design and fabrication of low actuation voltage K-band MEMS switches for* RF applications

S Pacheco - 2004 - search.proquest.com
The micromechanical switch is without doubt the paradigm RF MEMS device. However, a
major drawback is that these switches are usually electrostatic in nature and commonly …