This work describes a novel micromechanical structure capable of producing out-of-plane
motion from in-plane forces generated by electrostatic microelectromechanical system …

A novel self-aligned vertical electrostatic combdrives actuator has been developed and
demonstrated, which enhances the capabilities and applications of high aspect ratio silicon …

A MEMS electrostatic actuator based on the lever principle, which aims to obtain a large out-
of-plane displacement and has a simple structure and fabrication process is presented in …

Presented in this paper is a bi-directional out-of-plane actuator which combines the merits of
the electrostatic repulsive principle and the electrostatic attractive principle. By taking …

A new single wafer process with a unique integration of bulk and surface micromachining
process steps has been designed, developed, and demonstrated for MOEMS/MEMS …

A three-degrees-of-freedom microelectromechanical systems (MEMS) electrostatic actuator
was developed, fabricated, and tested. The actuator utilizes a piston-tube configuration that …

We present herein a new out-of-plane MEMS actuator array. Previously, we developed out-
of-plane MEMS actuators having a 180-μm stroke in the out-of-plane direction. However, the …

An analytical model is developed for a two-layer repulsive-force out-of-plane micro
electrostatic actuator by using conformal mapping techniques. The model provides the …

This paper presents the design, analysis, fabrication, and characterization of an active
cantilever device integrated with a high-bandwidth 2-DOF translational (XY) …

A tri-electrode electrostatic actuator with one moving microelectromechanical systems
(MEMS) electrode and two stationary electrodes (tri-electrode actuator topology) is …