High performance MEMS accelerometer and gyro with a unique SMD and digital interface

A Filipe, V Gaff, W Unrau… - 2021 DGON Inertial …, 2021 - ieeexplore.ieee.org
High performance inertial sensors based on Micro-Electro-Mechanical Systems (MEMS)
have been progressively replacing quartz accelerometers, mechanical gyroscopes (gyros) …

Gyroscopes

G Allegato, C Valzasina, L Zanotti - … of Silicon Based MEMS Materials and …, 2020 - Elsevier
This chapter shows how micro electro-mechanical system (MEMS) inertial sensors
developed since last two decades, with focus onto gyroscopes. Inertial measurement units …

In-run navigation grade quartz MEMS-based IMU

S Zotov, A Srivastava, K Kwon, J Frank… - … on Inertial Sensors …, 2020 - ieeexplore.ieee.org
Emcore has demonstrated in-run navigation grade performance with a compact inertial
measurement unit (IMU) based on Systron Donner Inertial technology. The IMU is based on …

Development of a navigation-grade MEMS IMU

B Johnson, C Albrecht, T Braman… - … on Inertial Sensors …, 2021 - ieeexplore.ieee.org
Performance data is presented from a MEMS-based IMU being developed at Honeywell with
the objective of navigation-grade performance for a variety of applications. Design of the …

A new high-performance, closed-loop digital MEMS accelerometers and gyros platform for dynamic applications

P Gazull, A Filipe, O Gigan… - 2023 IEEE/ION Position …, 2023 - ieeexplore.ieee.org
The new high-performance digital inertial MEMS platform is ensuring a maximum
commonality (process, electronics, packaging) between the accelerometers and the gyros to …

Compact quartz MEMS IMU: From tactical to navigation grade

S Zotov, R Moore, S Shtigluz, J Paxton… - 2021 DGON Inertial …, 2021 - ieeexplore.ieee.org
EMCORE has demonstrated high-end tactical grade and navigation grade performance of a
compact inertial measurement unit (IMU) based on quartz MEMS inertial sensor technology …

A direct approach for high-quality MEMS based IMU/INS production

L Poletti, DS Sanchis, R Siryani - 2020 DGON Inertial Sensors …, 2020 - ieeexplore.ieee.org
This paper describes an industrial process for microelectromechanical systems (MEMS)
based inertial measurement unit (IMU) and inertial navigation systems (INS) production …

Smart-MEMS based inertial measurement units: gyro-free approach to improve the grade

G Chatterjee, L Latorre, F Mailly, P Nouet… - Microsystem …, 2017 - Springer
Inertial measurement units (IMU) are essentially a combination of acceleration and rotation
rate sensors, generating position and attitude information. For tactical and strategic …

Silicon MEMS inertial sensors evolution over a quarter century

G Langfelder, M Bestetti, M Gadola - Journal of Micromechanics …, 2021 - iopscience.iop.org
Silicon-based microelectromechanical systems (MEMS) inertial sensors have become
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …

Quartz MEMS Accelerometer for EMCORE Inertial Technology from Tactical to High-End Navigation

S Zotov, R Moore, S Shtigluz, A Lu… - 2022 DGON Inertial …, 2022 - ieeexplore.ieee.org
Inertial measurement units and navigation systems range from low-end tactical to strategic
grade, spanning a very large spectrum of sensor performance. EMCORE makes use of its …