Dry efficient cleaning of poly-methyl-methacrylate residues from graphene with high-density H2 and H2-N2 plasmas

G Cunge, D Ferrah, C Petit-Etienne… - Journal of Applied …, 2015 - pubs.aip.org
Graphene is the first engineering electronic material, which is purely two-dimensional: it
consists of two exposed sp 2-hybridized carbon surfaces and has no bulk. Therefore …

Cleaning of graphene surfaces by low-pressure air plasma

PV Pham - Royal Society Open Science, 2018 - royalsocietypublishing.org
The polymer residues still present on a chemical vapour-deposited graphene surface after
its wet transfer by the poly (methyl methacrylate) method to the arbitrary substrates, tend to …

XPS investigations of graphene surface cleaning using H2‐ and Cl2‐based inductively coupled plasma

D Ferrah, O Renault, C Petit‐Etienne… - Surface and …, 2016 - Wiley Online Library
It is known that graphene surface contaminations by residues affect drastically its intrinsic
properties and cannot be avoided when chemical vapor deposited (CVD) graphene is …

CF4/H2 Plasma Cleaning of Graphene Regenerates Electronic Properties of the Pristine Material

D Ferrah, O Renault, D Marinov… - ACS Applied Nano …, 2019 - ACS Publications
The impact on the electronic and structural properties of chemical vapor deposition (CVD)
graphene transferred onto SiO2/silicon (Si) of continuous H2-based plasmas, used to …

Si-compatible cleaning process for graphene using low-density inductively coupled plasma

YD Lim, DY Lee, TZ Shen, CH Ra, JY Choi, WJ Yoo - ACS nano, 2012 - ACS Publications
We report a novel cleaning technique for few-layer graphene (FLG) by using inductively
coupled plasma (ICP) of Ar with an extremely low plasma density of 3.5× 108 cm–3. It is …

Engineering graphene properties by modulated plasma treatments

GV Bianco, A Sacchetti, C Ingrosso, MM Giangregorio… - Carbon, 2018 - Elsevier
We demonstrate modulated H 2 and O 2 plasma treatments as an effective methodology for
controlled chemical functionalization by hydrogen and oxygen atoms of single-and multi …

Controlled modification of mono-and bilayer graphene in O2, H2 and CF4 plasmas

A Felten, A Eckmann, JJ Pireaux, R Krupke… - …, 2013 - iopscience.iop.org
In this work, covalent modification of mono-and bilayer graphene is achieved using
tetrafluoromethane (CF 4), oxygen and hydrogen RF plasma. Controlled modification of …

Ways to eliminate PMMA residues on graphene——superclean graphene

B Zhuang, S Li, S Li, J Yin - Carbon, 2021 - Elsevier
Graphene as a promising 2D material has been widely studied due to its unique properties.
Transferring CVD graphene to other substrates from its original metal foil is important for its …

Simple, green, and clean removal of a poly (methyl methacrylate) film on chemical vapor deposited graphene

JH Park, W Jung, D Cho, JT Seo, Y Moon… - Applied Physics …, 2013 - pubs.aip.org
The clean removal of a poly (methyl methacrylate)(PMMA) film on graphene has been an
essential part of the process of transferring chemical vapor deposited graphene to a specific …

Hydrogen plasmas processing of graphene surfaces

E Despiau-Pujo, A Davydova, G Cunge… - Plasma Chemistry and …, 2016 - Springer
To assist the development of plasma processes to pattern graphene in a controlled way,
interactions between hydrogen plasma species (H, H+, H 2+) and various types of graphene …