Electrostatically actuated nanoelectromechanical (NEM) relays are integrated with silicon
nMOS devices. An nMOSFET successfully drives a NEM relay with the MOSFET serving as a …

This paper demonstrates electrical results of an integrated Si CMOS-electrostatically
actuated nanoelectromechanical (NEM) relay circuit. This is an initial step towards realizing …

We show by simulation that a three-terminal nanoelectromechanical (NEM) relay combined
with a feedback resistor provides a tunable transconductance Gm over an adjustable input …

This paper reports the design, fabrication, characterization, and scaling analysis of novel
buckling-based nanoelectromechanical relays that use, for the first time, piezoelectric …

Laterally actuated polycrystalline silicon nanoelectromechanical (NEM) relays with
enhanced electrical properties are presented. Due to surface oxidation of polysilicon in room …

We present a nanoelectromechanical (NEM) relay that is capable of demonstrating two
stable states without on-hold power due to the influence of van der Waals force. This is …

Integrated nanoelectromechanical (NEM) relays can be used instead of transistors to
implement ultra-low power logic circuits, due to their abrupt turn off characteristics and zero …

Nanoelectromechanical (NEM) switches are similar to conventional semiconductor switches
in that they can be used as relays, transistors, logic devices and sensors. However, the …

The need for more energy-efficient solid-state switches beyond complementary metal-oxide-
semiconductor (CMOS) transistors has become a major concern as the power consumption …

Sub-50 mV operation of nano-electro-mechanical relays is demonstrated for the first time,
enabled by an anti-stiction molecular coating. Specifically, a self-assembled monolayer of …