Small-scale mechanical characterization is essential for ensuring the service, performance,
and lifetime of microscopic components, such as thin films and coatings, electronic sensors …

Micro-and nano-mechanical devices are certain to play an ever more important role in future
technologies. Already, sensors and actuators based on MEMS technologies are common …

Thin films at the micrometer and submicrometer scales exhibit mechanical properties that
are different than those of bulk polycrystals. Industrial application of these materials requires …

Since its initial development in the early 1980's [1], nanoindentation has matured into one of
the premier testing techniques for measuring mechanical properties at the micrometer and …

One-dimensional (1-D) nanomaterials exhibit great potentials in their applications to
functional materials, nano-devices and systems owing to their excellent properties. In the …

In the last two decades, the study of microdevices such as micro-electro-mechanical systems
(MEMS) has rapidly grown into a critical area of technology with several applications that …

Thin films and nanomaterials lie at the heart of the burgeoning fields of nanoelectronics and
nanotechnology, and the accurate measurement of their properties provides a basis for …

The field of in situ nanomechanics is greatly benefiting from microelectromechanical
systems (MEMS) technology and integrated microscale testing machines that can measure a …

Recent advances in electronics have enabled nanomechanical measurements with very low
noise, fast time constants and high data acquisition rates. These capabilities open the door …

The objective of the present study is to investigate the length-scale effects on mechanical
properties of nano-scale thin films. To perform in-situ studies in SEM and TEM for …