Over the last couple of decades, the advancement in Microelectromechanical System
(MEMS) devices is highly demanded for integrating the economically miniaturized sensors …

Microelectromechanical systems (MEMS) are a foundation for a broad range of mechanical,
chemical, optical, and biotech products (sensors, microstructures and actuators) fabricated …

The development of microelectromechanical systems (MEMS) based on micromachining
and microelectronics technologies has been significant for almost a decade. However, it is …

Microelectromechanical system (MEMS) reveals excellent flexibility and adaptability in
miniaturization devices owing to its compact dimension, low power consumption, and fine …

Micromachining and micro-electromechanical system (MEMS) technologies can be used to
produce complex structures, devices and systems on the scale of micrometers. Initially …

In recent years, microelectromechanical systems (MEMS) have been widely applied in
diverse science and engineering domains. MEMS-based microgrippers provide advantages …

Accelerometers are among the most mature sensor technologies with a broad range of
applications in multiple fields and industries. They represent the most widely used …

Today, the vast majority of microelectromechanical system (MEMS) sensors are
mechanically rigid and therefore suffer from disadvantages when used in intimately …

This paper provides a comprehensive review on the design and development of micro
displacement amplification mechanisms. Micro displacement amplification mechanisms are …

The rapid development of the fifth-generation mobile networks (5G) and Internet of Things
(IoT) is inseparable from a large number of miniature, low-cost, and low-power sensors and …