Manufacturing equipment and scientific instruments, including wafer scanners, printers,
microscopes, and medical imaging scanners, require accurate and fast motions. An increase …

Mechatronic design is the integrated design of a mechanical system and its embedded
control system. In order to make proper choices early in the design stage, tools are required …

Technology in a broad sense is driven by developments in semiconductor technology,
particularly with respect to the computational power of devices and systems, as well as …

Applications of precision engineering, generally defined as manufacturing to tolerances that
are better than one part in 105, abound and can be found in various semiconductor …

Accepted manuscript Page 1 Accepted manuscript Ruderman, M., Iwasaki, M. & Chen, WH (2020).
Motion-Control Techniques of Today and Tomorrow: A Review and Discussion of the …

Motion control requirements in electronic manufacturing demand both higher speeds and
greater precision to accommodate continuously shrinking part/feature sizes and higher …

This book introduces researchers and advanced students with a basic control systems
background to an array of control techniques which they can easily implement and use to …

In this paper, we address the problem of simultaneously achieving low trajectory tracking
errors and compliant control without using explicit mathematical models of task dynamics. To …

Feedforward control enables high performance for industrial motion systems that perform
nonrepeating motion tasks. Recently, learning techniques have been proposed that improve …

Since they entered our world around the middle of the 20th century, the application of
mechatronics has enhanced our lives with functionality based on the integration of …